PC Wiring System Series PCW

P.24 P.36 P.43 32 point I/O unit Wired to PLC I/O card via connection cable and wires connecting equipment to the terminal blocks. 32 point output reduced common unit Wired to PLC I/O card via connection cable and wires connecting equipment to the terminal blocks.

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36

High-precision Digital Pressure Switch

Device state parameters (index 36) Readable device states are as follows.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

1

Applicable bore size B (C) (D) d H JSN-020B 20 24 (27.7) 24 M18 x 1.5 7 JSN-032B 25, 32 30 (34.6) 30 M22 x 1.5 7 JSN-040B 40 36 (41.6) 36 M27 x 2.0 8 10 JCM Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height Solid state auto switch D-M9m D-M9mW D-M9mA Hs1 B 22 (24) A Hs2 ( ): Dimension of the D-M9mA.

Pulse Valve

Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

T IDK Cover Cover installation latch 249 DMK Series Dimensions DMK6 36 0.1 36 0.1 44 37 (Socket side: With a cover) Panel mounting hole Panel mounting hole 4 x 4.3 M4 round head screw 40.5 59.5 SMC 6 1 19 26 36 2 5 3 4 11 36 45 38 DMK12 43 0.1 43 0.1 47 53 Panel mounting hole (Socket side: With a cover) Panel mounting hole 4 x 4.3 M4 round head screw 50.5 69.5 SMC 6 1 8 2 3 9 10 46 25

CV/MVGQ

2 x Stroke ZZ + 2 x Stroke CE2 ML2B I H1 H FZ FY FX FT B1 FD MM B F K AL B2 C2 D H2 HX A Eh8 Bore size (mm) 20 25 32 40 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 8 28 41 75 60 4 7 M8 x 1.25 34 13 5 15.5 8 18 57.5 13 26 30 5 C J G5-S 8 33.5 45 75 60 4 7 M10 x 1.25 40 13 5.5 19.5 10 22 63.5 17 32 37 6 8 37.5 45 75 60 4 7 M10 x 1.25 40 13 5.5 19.5 12 22 68 17 32 37 6 CV 10 46.5 50 82 36

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

XM, XY

150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal XMD, XYD Series PAT.

Stability of suction position,

ZP3EA-S2 [Weight: 7.6 g] 24 47 15 29 4 20 36 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM Applicable pad part no.

Vacuum Pad

18 36 M12 x 1 M12 x 1 M12 x 1 Vertical 36 Width across flat 14 Vertical Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 10 5 15 10 5 15 10 5 15 Lateral Lateral 2 2 2 With Adapter: Vacuum Inlet 17 16 11.4 1.8 13 8.4 1.8 11 10 6 1.8 With Adapter: Vacuum Inlet 14 Lateral With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-T10B

ZP

Form w 1 Material e Vacuum inlet 30 10 27 12.5 10 (Rotating angle) 8 10 2 13 16 27.5 13 10.5 10 to 32 B5 2 M5 x 0.8 5 20 25 32 15.5 12.5 9 12 3 32 32.5 16 13 20 25 B8 E N S U F GN GS Width across flats G 36 15.5 12.5 2 M8 x 1.25 8 12 12 3 32 36.5 16 13 40 39 18.5 12.5 2.5 19 5 50 40 19.5 13.5 20 25 B01 N01 T01 F ZP T F Width across flats H Width across flats J A 36 15.5 12.5 2 Rc1/8 NPT1/

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

MQQ

12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

SI unit ( device)

Device Status parameter (index 36) For Device status, the following Device conditions are specified.

PFxx-OMU0002

Hysteresis mode is selected: Refer to page 35 Window comparator mode is selected: Refer to page 36 Accumulated output mode is selected: Refer to page 37 Accumulated pulse output mode is selected: Refer to page 39 Move on to select display colour.