ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Flow Sensor Series PFMV

Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

Digital Flow Switch (Integrated display type)

2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 Flow CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Setting/display flow range 0 to 9 ft3 x10-1 Accumulated flow Min. setting/display unit 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/pulse ft3 x 10-2/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

Vacuum Regulator

1 2 3 43 Description Pressure gauge Gauge nut O-ring R 1/8 23.5 3 breathing port 1 to 3 are assembled before shipment. 39.5 2-Color Display High Precision Digital Pressure Switch Part No.

PROFIBUS DP Compatible Fieldbus System

1.

PF-OMM0004_C

[F 1] OUT1 -28No.PF-OMM0004-D 1. [F 1] [oUt1] 2. ON-OFF -29No.PF-OMM0004-D 3. a. ([n_1]) (33 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (33 ) -30No.PF-OMM0004-D c. / -31No.PF-OMM0004-D ( [n1AH]) ( [n1dH]) 3 1 3 6 6 1 6 3 1 1 -32No.PF-OMM0004-D 4. OUT1 5. [F 1] OUT1 -33No.PF-OMM0004-D -34No.PF-OMM0004-D -35No.PF-OMM0004-D [F 2] OUT2 OUT2 OUT1 1.

IZx-OMR0035

.: IZ-OMR0035 PRODUCT NAME Ionizer MODEL / Series IZF21/31 Series 1 Doc. No.: IZ-OMR0035 Contents Safety Instructions . 3 1. How to Order. 8 1-1. Ionizer . 8 1-2. Accessories. 8 1-3. Option . 10 2. Procedures to Operation . 10 3. Installation and Wiring . 11 3-1 Installation . 11 3-1-1. Precautions for Installation . 11 3-1-2. Installation of Ionizer . 12 3-2. Wiring . 13 3-2-1.

Rotary Table: High Precision Type

M(D)SUA1 P211070-1 M(D)SUA3 P211090-1 M(D)SUA7 P211060-1 M(D)SUA20 P211080-1 *The auto switch unit can be retrofitted on a rotary actuator.

SYJA3000

SYJA3140 1 pc. SYJA3240 1 pc.

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

Pressure Relief 3 Port Valve With Locking Holes

Reference data. 1 1 - 7.

KS/KX

5.0 8 26 15 15 12.8 24 17 6 28 1 8 1 4 20 26 28 34 43 69 77 95 89 106 14 8.6 8.6 4 28 29 32 33 38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

The stroke can be set in 1 mm increments.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Compact Rotary Actuator

1 3 Plate 1 2 Cover 1 1 Body 1 No.

Transfer

Special resin Stainless steel Special resin Stainless steel Special resin NBR NBR NBR NBR Special resin Stainless steel Carbon tool steel Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 1 1 2 2 2 2 2 2 4 2 6 4 8 2 2 6 2 1 2 4 4 4 3 4 4 1 1 2 2 4 1 4 2 1 1 1 1 1 2 2 1 1 Description Cylinder tube Head cover WR Head cover WL Piston yoke Piston End cover Wear ring Cushion ring Cushion needle Stopper Belt separator

PFxx-OMS0001CN

IN(70) IN OUT IN OUT 8cm M8 Rc1/2NPT1/2Rc3/4NPT3/4 2830 Nm 1/2 30 mm 3/4 35 mm 9mm 2F.S. -17No.PF-OMS0001CN-A FG 1 DC(+) 2 OUT2// 3 DC(-) 4 OUT1 -18No.PF-OMS0001CN-A NPN(2 ) PFMC7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMC7--CNPN(1 )(420 mA) PFMC7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFMC7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()30msec

PSxx-OMT0001CN

No.PS-OMT0001CN-E // ISA3-A/B2 OUT1 OUT2 or 2 7 8 14 15 (ISA3) 15 () 17 (2 ) 17 18 21 27 27 30 35 39 42 43 45 OUT1 OUT2 45 OUT1 45 OUT2 46 47 47 48 48 48 () 62 63 64 65 66 67 -1No.PS-OMT0001CN-E 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating