Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 6 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: C6 (ø6 One-touch Fitting), Bracket: F (Bracket)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: 01 (Rc1/8)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: 01N (NPT1/8)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: C4 (ø4 One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: M5 (M5X0.8)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 6 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Air Cylinder Series CM2

45 45 50 PG 22 27 27 29 Z 37 41 41 45 PH 19.5 24 24 24 ZZ 181 195 197 233 PL 20 24 24 24 PW 38 41 41 41 N 15 15 15 NA 24 30 S 127 137 139 167 MM M8 x 1.25 Bore (mm) Bore (mm) 20 25 32 40 20 25 32 40 1 8 1 8 1 8 1 4 33.5 M26 x 1.5 M10 x 1.25 37.5 M26 x 1.5 M32 x 2 34.5 M10 x 1.25 46.5 M14 x 1.5 21.5 42.5 618 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Single Clevis Style (C)

Air Cylinder

5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 41 122 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 45

Made to Order

series GB Stroke B Stroke A (mm) Bore size GB Q S ZZ 40 29 53 168 230 50 33 59 180 249 63 33 61 196 268 80 41 73 232 320 100 41 79 252 341 Q S + Stroke (A + B) ZZ + Stroke (A + B) CNA2 series Stroke A Stroke B GE (mm) Bore size GE S ZZ 40 29 237 299 50 33 258 327 63 33 280 352 80 41 334 422 100 41 372 461 ZZ + Stroke (A + B) S + Stroke (A + B) -X -X 1789 Made to Order Common Specifications

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.