SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

CVRA1-E

Table of Contents Safety Instructions 2 Outline 16 Specification 16 Effective torque 18 Rotation range of Keyway and How to adjust the rotation speed 18 How to adjust the Air cushion 19 Internal structure and parts description 20 Rotary Actuator with solenoid valve internal structure 20 Mounting 21 Restriction of the load 21 Operation of shaft couplings 21 Piping and operating direction 22

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option

Air Cylinder Series CS1

n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 80 90 85 10 D-M9V D-M9WV 80 + 30 (n4) 2 10 + 30 (n2) 2 90 + 30 (n4) 2 85 + 30 (n4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 120 20 115 D-M9AL 115 + 40 (n2) 2 120 + 40 (n2) 2 (n = 2, 4, 6, 8 ) 20

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

48

Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size

High Vacuum Angle Valve

type * Size 16 is not applicable to H4, H5.

Compact Guide Cylinder

11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

IP8001 Series

ATEX Intrinsic Safety Type of Explosion Protected Construction 16 Explosion Protected Construction Rate 16 Wiring 16 Barrier 17 Description of Components 18 Contents of LCD Display 18 Initial Adjustment 19 Change of Parameters for Initial Operation 19 Initial Adjustment 19 1.Selection of calibration mode 19 2.Check angle of feedback lever 20 3.

Step Motor Controller (Servo / 24 VDC)

0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1 0 1 22 0 1 0 1 1 0 22 0 1 0 1 1 0 23 0 1 0 1 1 1 23 0 1 0 1 1 1 24 0 1 1 0 0 0 24 0 1 1 0 0 0 25 0 1 1 0 0 1 25 0 1 1 0 0 1 26 0 1 1 0 1 0 26 0 1 1 0 1 0 27 0 1 1 0 1 1 27 0 1 1 0 1 1 28 0 1 1 1 0 0 28 0 1 1 1 0 0 29

CE2

NT-04 NT-05 NT-08 NT-10 M14 x 1.5 8 22 25.4 21 CX 11 27 31.2 26 M18 x 1.5 13 32 37.0 31 M22 x 1.5 CY 16 41 47.3 39 M26 x 1.5 MQQ M Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the proper allowable kinetic energy. It must not be operated out of the allowable range, which is shown in the graph on the right.

CE2

11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

-DX#F (16 inputs) 16 bit (16 bit) EX600-DY#B (8 outputs) (16 bit) 16 bit2 EX600-DY#E (16 outputs) (16 bit) 16 bit Digital output unit EX600-DY#F (16 outputs) (16 bit) 16 bit EX600-DM#E (8 inputs / 8 outputs) 16 bit2 16 bit2 Digital I/O unit EX600-DM#F (8 inputs / 8 outputs) 16 bit2 16 bit2 Analogue input Unit EX600-AXA (2ch) 4 word3 (4 word) Analogue output Unit EX600-AYA (2ch

Compact Slide Series MXH

In Graph (10), find the intersection of a 30 mm overhang and load mass of 0.1 kg, which results in a determination of 16. 19 Compact Slide 6, 10, 16, 20 Series MXH How to Order MXH 10 M9BW 60 Made to Order *Refer to page 21 for details. Compact slide Number of auto switches Nil S 2 pcs. 1 pc.

Title not found

Figures in body of chart are suggested minimum rod diameters Exposed Length of Piston Rod (IN) Tons 10 20 40 60 70 80 100 120 1/2 3/4 1 3/4 13/16 1-1/16 1 5/8 7/8 1-1/8 1-1/4 1-3/8 1-1/2 11/16 15/16 1-3/16 1-3/8 1-1/2 2 3/4 1 1-1/4 1-7/16 1-9/16 1-3/16 3 13/16 7/8 1-1/8 1-3/8 1-9/16 1-5/8 1-7/8 4 15/16 1 1-3/16 1-1/2 1-5/8 1-3/4 2 2-1/4 5 1 1-1/8 1-5/16 1-9/16 1-3/4 1-7/8 2-1/8 2-3/8 7-1/

Title not found

Figures in body of chart are suggested minimum rod diameters Exposed Length of Piston Rod (IN) Tons 10 20 40 60 70 80 100 120 1/2 3/4 1 3/4 13/16 1-1/16 1 5/8 7/8 1-1/8 1-1/4 1-3/8 1-1/2 11/16 15/16 1-3/16 1-3/8 1-1/2 2 3/4 1 1-1/4 1-7/16 1-9/16 1-3/16 3 13/16 7/8 1-1/8 1-3/8 1-9/16 1-5/8 1-7/8 4 15/16 1 1-3/16 1-1/2 1-5/8 1-3/4 2 2-1/4 5 1 1-1/8 1-5/16 1-9/16 1-3/4 1-7/8 2-1/8 2-3/8 7-1/

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 60 80 100 25.50