70astamb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

Square Tube Type Air Cylinder Series MB1

Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Vacuum Ejector Series ZM

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

C92

Contents CS92-32 CS92-40 CS92-50 CS92-63 CS92-80 CS92-100 CS92-125 CS92-160 32 40 50 63 80 100 125 160 Kits include items 16 to 21 Seal kits consist of items 16 to 21 1.12-5 Series C92 Without Mounting Bracket C92S B-Stroke Bore (mm) WA WB WH ZZ VD AM C D E EE G KK H J K KW M N P S SW B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 33 44 52 64 78 92 110 140 12 16 20 20 25 30 32 40 46 60

51

pin part no. 20 25, 32 40 50, 63 80 100 Part no.

Refrigerated Thermo-chiller

[Outlet port: Max.] 0.9 50 40 0.8 0.4 0.7 40 30 0.6 0.3 30 0.5 20 0.4 0.2 20 0.3 [Return port] 10 0.2 0.1 10 [Return port] 0.1 0 0 0 0 0 10 20 30 40 0 10 20 30 40 Lifting height (m) Pressure (MPa) Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow (l/min) The pump capacity of the HRZ010-W1S is same as that of the HRZ001-L1 group on page 85.

0.55

How to Order Manifold Assembly Example (VV5F3-40) Closed center (24 VDC) VF3340-5GZ1 (1 set) Double solenoid (24 VDC) VF3240-5GZ1 (1 set) Single solenoid (24 VDC) VF3140-5GZ1 (3 sets) Manifold base (5 stations) VV5F3-40-052-02 U side 1 3 2 Stations D side VV5F3-40-052-02 1 set (Type 40, 5-station manifold base part no.) VF3140-5GZ1 3 sets (Single solenoid part no.)

Compact Slide Series MXH

0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (6) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (12) Load Eccentricity 200 mm 1 10 10 0.1 Mass m (kg) 1 1 Mass m (kg) Mass m (kg) 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang

Air Cylinder

32 mm 40 40 mm 45 45 mm 50 50 mm 56 56 mm 63 63 mm 67 67 mm 80 80 mm 85 85 mm 100 100 mm For applicable auto switches, refer to the table below.

Water-cooledThermo-chiller

Facility water system Electrical system Facility water temperature +27F (15C) Circulating fluid temperature Conditions 50 to 95F (10 to 35C) Facility water temperature 7.9 gpm (30 L/min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Facility water required flow rate Temperature

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

2/3 Port Valve for Various

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 (1) 10 5 (2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

PFxx-OMX0002

A to B C to D 3,000 L 30 to 3000 30 to 3150 40 to 4000 40 to 4200 L/min 6,000 L 60 to 6000 60 to 6300 40 to 4000 40 to 4200 12,000 L 120 to 12000 120 to 12600 40 to 4000 40 to 4200 PF3A7#H 3,000 L 1.1 to 105.9 1.1 to 111.2 40 to 4000 40 to 4200 cfm 6,000 L 2.2 to 211.9 2.2 to 222.4 40 to 4000 40 to 4200 12,000 L 4.0 to 424.0 4.0 to 445.0 40 to 4000 40 to 4200 : The flow ranges and relationship