0.4

Purchasing order is available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

Pressure Sensor Controller

Mounting by bracket Fix the bracket to the product with the set screws M3 x 5 L (2 pcs.) as attached. The tightening torque of the set screws must be 0.5 to 0.7 Nm. Mounting by panel mount adapter Fix the panel mount adapter to the product with the set screws M3 x 8 L (2 pcs.) as attached.

ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24 VDC + Black OUT Load Internal data error Blue DC() 16-2-9 10 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 30 9.5 25 8 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

E-P HYREG ® Series VY1

Pressure gauge (Option) G27-10-01 Pilot EXH port AL Silencer (Option) AN120-M5 Rc 1/8 gauge port Foot (Option) VEX1-18-2 Hexagon socket head cap screw M3 =8 (2 pcs.) (With spring washer) ( ) Bracket (Option) VEX1-18-1A 2-4.5 mounting hole Hexagon socket head cap screw M3 =8 (2 pcs.)

Card Motor

F 6.5 Note 1) 4 M3 0.5 depth 2 Rail mounting screw (mm) 7.5 24 Stroke Table dimensions Rail dimensions Home position Model A B C D 10 Note 4) E 60 F 50 G 4 H 10.5 LAT3m-10 49 4 LAT3m-20 20 69 6 25 90 80 14 20.5 Note 2) depth 2 +0.03 0 3 depth 2 +0.05 0 3 3.5 LAT3m-30 30 89 6 25 120 110 24 30.5 Rail dowel pin hole 320.1 16 Note 2) 2 Card Motor Controller Series LATC4 RoHS How to Order LATC4

E-P HYREG ® Series VY1 1

(With spring washer) ( ) 2-M3 bracket mounting thread 4-4.5 mounting hole 14-10-9 10 Series VY1 Dimensions VY1200 1-01 02 Rc 1/8 Gauge port Connection mark All types are the same in terms of connection.

180

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

Flow sensor

Part number Description Remarks ZS-36-A1 1 station: 2 L-type brackets With mounting screws (M3 x 15 L) 2 pcs. ZS-36-A2 2 station: 2 L-type brackets With mounting screws (M3 x 25 L) 2 pcs. ZS-36-A3 3 station: 2 L-type brackets With mounting screws (M3 x 35 L) 2 pcs. ZS-36-A4 4 station: 2 L-type brackets With mounting screws (M3 x 45 L) 2 pcs.

Cylinder

I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

VDW Series

24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Digital Flow Switch (Remote type monitor unit)

x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard condition.

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PF2MC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PF2MC7202 (M3 x 5, 2 pcs.)

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

Miniature Guide Rod Cylinder Series MGJ

14.5 17 20 63.2 15 38.4 55.6 10 33.0 48.0 5 27.3 40.6 6 10 Series Variations Standard stroke (mm) Cushion Auto switch Bore size (mm) Guide rod size (mm) Series 5 10 15 20 6 10 5 6 Rubber bumper (Both sides) D-F8 MGJ Miniature Guide Rod Cylinder 6, 10 Series MGJ How to Order 6 10 F8N MGJ Miniature Guide Rod Cylinder Miniature Guide Rod Cylinder Number of auto switches Nil S 2 pcs. 1 pc.

Clamp Cylinder Series CK1

Auto Switch l1 50 Safety distance (mm) 40 Operational range 30 l1 20 l1 Dangerous range 10 0 5000 10 15000 20 Welding current (A) l2 50 40 Safety distance (mm) 30 l2 l2 Operational range 20 10 0 5000 10 15000 20 Welding current (A) 1340

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.