EX600-WEN_WSV.eng

'HFODUHVXQGHULWVVROHUHVSRQVLELOLW\WKDWWKHIROORZLQJHTXLSPHQW 7UDGH1DPH 60&:LUHOHVVV\VWHP 0RGHO1XPEHUV (;:(1(;:(1 (;:31(;:31(;:69(;:69 (4) Mounting the valve plate. Mount the valve plate (EX600-ZMV#) to the valve manifold using the set screws. (M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. M12 4-pin Socket, D-code 4 Configuration Pin No.

EXxx-OMV0028.eng

'HFODUHVXQGHULWVVROHUHVSRQVLELOLW\WKDWWKHIROORZLQJHTXLSPHQW 7UDGH1DPH 60&:LUHOHVVV\VWHP 0RGHO1XPEHUV (;:(1(;:(1 (;:31(;:31(;:69(;:69 (4) Mounting the valve plate. Mount the valve plate (EX600-ZMV#) to the valve manifold using the set screws. (M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. M12 4-pin Socket, D-code 4 Configuration Pin No.

LEF-OM006xx

INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.

LZ-OM003xx

Auto switch mount bracket BJ 31 11.

High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

CXWM/CXWL

Theoretical Output (N) Made to Order Specifications (For details, refer to page 8-31-1.)

HRX-OM-W069

Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

V100 SY SYJ Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 Dimensions VK L (mm) A Applicable fittings fitting d Model A L D VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 16 16 18 20.5

HRX-OM-W004

Master This product This product This product (first slave) (second slave) st (31 slaves) Do not connect any wire to other PIN numbers. Fig 3.2-1 RS-485 connector connection Tips 1 master : 1 product, or 1 master: N products. In the latter case, up to 31 products can be connected.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B [110] 81 35 Light (For TL, TZ) Max.12 31.3 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 NO NO PE PE [243] 237.6 239 228.5 213 31 31 130 130 52 52 41 41 105 105 [ ]: With indicator light (TL, TZ) 1312 Note) CE-compliant: D/DO only (Electrical entry) VP3145/3165/3185 Series Made to Order [Option] Please contact SMC

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

00 02 04 No 2 port valves used 2 pcs.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Symbol LQ2 integral fitting Symbol 2 3 4 Body class 2 3 4 Orifice dia. 4 8 10 Port B (OUT) different dia. size LVH Metric sizes Symbol Nil Application Ports A & B same size 03 04 06 08 10 12 3 4 6 8 10 12 LVD Refer to the applicable tubing table to the right Different diameter tubings can be selected within the same body class.

CRJ

BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

Low torque Metal seal type Rotary joint

(6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10

%silltr

How much water is crntained in 1 m3? Dew point2soo = 24glm".0.65= 15.6 g/mt When air is compressed, its capacity for holding moisture in vapor form is only that of its reduced volume. Hence, unless the temperature rises substantially, water will condense out. Erample 2: 1o m3 ol almospheric air at 15oc and 65yo r.h. is compresssd to 6 bar gauge pressure.

SMC Basic Pneumatics

How much water is crntained in 1 m3? Dew point2soo = 24glm".0.65= 15.6 g/mt When air is compressed, its capacity for holding moisture in vapor form is only that of its reduced volume. Hence, unless the temperature rises substantially, water will condense out. Erample 2: 1o m3 ol almospheric air at 15oc and 65yo r.h. is compresssd to 6 bar gauge pressure.

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Ozone Resistant

1200-M3 1400-M3 1000-M5 120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-,