High Vacuum Angle Valve, XL Series

high temperature specifications are not available with switches. 1Pa=0.145 x 10-3psi 1MPa=145psi Straight Solenoid Valve (with Metallic Seal Fitting) Effective sectional area mm 2 Service life million cycles Operating pressure Leakage Pa m 3/sec Model Valve type Piping size Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43

HRX-OM-R026

PV SV HRSH Series 5.18Warming up function 5-43 HRX-OM-R026 Chapter 5 Display and setting of various functions 5. Select the warming up temperature setting from the table below with [] key or [] key, and confirm by pressing SEL.

HAW

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain). 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Cooling water (l/min) Model 70C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 50C 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 100C 37.5 47 51 38 44.5 48 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36

C76

fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43

Rotary Actuator/Vane Style Series CRB2

CDRB2BWU15-S M5 x 0.8 M5 x 0.8 M3 x 0.5 18.5 29 25 M3 x 0.5 depth 5 CDRB2BWU15-D M3 x 0.5 DCDRB2BWU20-S M5 x 0.8 M5 x 0.8 25 36 25 M4 x 0.7 depth 7 CDRB2BWU20-D M5 x 0.8 CDRB2BWU30-S M5 x 0.8 M5 x 0.8 25 43 25 M5 x 0.8 depth 10 CDRB2BWU30-D M5 x 0.8 Note) For rotary actuators with angle adjuster and auto switch unit, connection ports are side ports only.

Vacuum Pad: Ball Joint Type

C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 16 18 32 35 2 13 16 49 40 50 ZPT F-B5-A14 (Without buffer/Male thread) M14 x 1 M5 x 0.8 Hexagon width across flats 19 5 5 20 D 5 F Hexagon width across flats 21 C Y 2.5 A B Dimensions (mm) A B C D F Y Model ZPT40F-B5-A14 40 43

C76

fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43

CJ2

Calculation: (Example) CJ2L10-45T Basic weight 43 (10-45 stroke) Mounting bracket weight 8 (Axial foot style) 43 + 8 = 51 g Mounting Bracket Part No. Bore size (mm) 6 CJ-L006B CJ-F006B Mounting bracket 10 CJ-L010B CJ-F010B CJ-T010B T-bracket is used with double clevis (D). 16 CJ-L016B CJ-F016B CJ-T016B Foot bracket Flange bracket T-bracket Auto Switch Mounting Bracket Part No.

CLQ

Thickness of Lock Unit Lock unit length Bore size (mm) A 27 mm to 50 mm 20 25 32 40 50 63 80 100 27 31 32 34 35 38 43 50 CL The lock unit does not project beyond the cylinders external dimensions CL1 A Body length MLGC Can be locked at any desired position Drop prevention in the middle of stroke Locking position can be changed in accordance with the external stopper position and the thickness

CNS

KA 20VA BN S + Stroke N RT N X X Y Y LT LX C B Data LS + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 16 Up to 1400 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 16 Up to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43

SY3000/5000/7000/9000

One-touch fitting for 8 C8 One-touch fitting for 10 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 3 position closed center SY7000 V 6 VDC C10 C8 C10 C12 S 5 VDC 3 Thread type R 3 VDC Rated voltage SY9000 Rc Nil For AC ( Hz) 50 60 F G 3 position exhaust center 1 100 VAC 2 200 VAC N NPT One-touch fitting (Inch size) NPTF T 4 Symbol Port size Applicable series 3 110

21

TN-020B TN-032B TN-040B Applicable bore size 20 25, 32 40 Applicable bore size Included retaining ring d L m t Dd9 Part no. l 26 28 25.5 M20 x 1.5 10 CD-S02 CD-S03 20, 25 32, 40 0.040 0.076 Type C8 for axis 8 32 34 31.5 M26 x 1.5 10 7.6 24.5 19.5 1.6 0.9 0.040 0.076 Type C10 for axis 10 41 45 40.5 M32 x 2 10 9.6 34 29 1.35 1.15 Note) Retaining rings are included. 11 Series CM3 Dimensions

8)C10 (One-touch fitting for ?10)W = 51n + 81, .41446 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81

8)C10 (One-touch fitting for ?10)W = 51n + 81, .89948 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)