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Therefore, supply pressure regulated by a built-in regulator e passes through the air supply solenoid valve q and is applied to the pilot chamber r. The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure.

Therefore, supply pressure regulated by a built-in regulator e passes through the air supply solenoid valve q and is applied to the pilot chamber r. The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure.

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

CQSX/CQ2X/CM2X 10 to 16 10 to 32 12 to 25 32 to 100 20 to 40 RE A B Air Cylinder Series CJ2X Page Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) REC 10, 16 0.06 1 CX 10-3-6 CY MQQ M Free Mount Cylinder Series CUX Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q

CQSX/CQ2X/CM2X 10 to 16 10 to 32 12 to 25 32 to 100 20 to 40 RE A B Air Cylinder Series CJ2X Page Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) REC 10, 16 0.06 1 CX 10-3-6 CY MQQ M Free Mount Cylinder Series CUX Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Free Mount Cylinder Series CUX Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q G RS H A Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

Description Material ALD600 ALD900 Aluminum casted Aluminum casted Aluminum die-casted Aluminum die-casted Body Bottom cover q w Replacement Parts No. Description Material Part no. ALD600 ALD900 12612AP Check valve assembly Pilot body assembly e r Maintenance 12609AP Warning Glass fiber-inserted epoxy resin t Bowl assembly 126139-1A 126059-1A 1.

Material Aluminum die-casted (SX3000: Zinc die-casted) Note White Body q Adapter plate White White White Resin Resin w e End plate Pilot body Piston Spool valve assembly Molded coil r Resin t Resin y Aluminum, HNBR Gray u Resin Caution Replacement Parts Part no. SX340 SX540 SX740 Mounting Screw Tightening Torques No.

5<3'95 % A " 8 " $ )% % 8 % =) *% $ ) 2% 8 % " 1 ,% 2 % ) .BB & A & 1% % $) $ ) ) ) ) ) 88 % ,) ; ' ; 8 1 ) /% ) / , A & 1% % '$ , $ 3 :; C $ 1 ,) ; ' ; ) ) ) ) 88 % /% ) / VQD VKF .$ VK VT VS t o r e q y u i w & q w e r t y u & D % % ' % % ' % % ! ! ! , !%,' ? !2! 8 % 8 % ? ( , 0( , = ) % $ B /EB3A /EB '!'

PB Construction Component Parts q e Description Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Material No. q w e r t y u r Resin Stainless steel Stainless steel Stainless steel NBR HNBR, Resin w t y u 17-2-83 Series VQ20/30 Dimensions: Series VQ20 In-line Type: Grommet (G) VQ21A1-GBracket mounting holes Mounting holes 2-3.2 through 2-3.2 through Light

Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Vacuum Filter AFJ20 to AFJ40 Symbol Vacuum lter SP AFJ40 AFJ30 AFJ20 How to Order ZCUK AMJ AFJ 30 q 03 e 80 B T Option/Nominal ltration rating/Type/Semi-standard: Select one of each for a to f. Semi-standard: When more than one specification is required, indicate in alphanumeric order.

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil