5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Improved durability under a high pressure environment with a polyurethane elastomer poppet How to Order Valve type 1 D G VCH410 06 Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) Voltage 1 2 3 4 5 6 100 VAC 200 VAC Port size 110 VAC 04 06 10 1/2 1 220 VAC 3 3/4 24 VDC 1 1 2 12 VDC Consult with SMC for other voltages.

Process Valve

VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

ZPT/ZPX

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions: Desired number of pads 5 pcs.

Cylinder with Lock Series MNB

177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101

Free Mount Cylinder

The maximum speed will be 141 mm/s. 50 32 25 20 10 5 16 Load weight (kg) (2.5) 10 6 [Double acting (D), Single acting, Spring return (S)] 6 [Single acting, Spring extend (T)] 1 0.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 0.05 0.01 50 100 300 200 (141)

Compact Cylinder

Relationship between Number of Needle Rotations and Piston Speed 32, 40 50, 63 800 800 32 32 50 700 700 600 600 63 Piston speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 0 0 1 2 3 4 5 6 7 8 9 10 7 Fully opened Without restrictor Without restrictor Fully opened Number of restrictors needle rotations Number of restrictors needle rotations

HRX-OM-W038

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Model LEFS16 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 Weight(kg) 0.83 0.90 0.98 1.05 1.13 1.20 1.28 1.35 1.43 1.50 0.12 Additional weight for lock(kg) Model LEFS25 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Weight(kg) 1.70 1.84 1.98 2.12 2.26 2.40 2.54 2.68 2.82 2.96 3.10 3.24 3.38 3.52 3.66 3.80 0.26 Additional weight for lock(kg) Model LEFS32 Stroke

Modular/F.R.L. Units Series AC

Operating compressor: 0.75 kW (100 l/min (ANR)) or more. When using 2 or more auto drains, multiply the value above by the number of auto drains to find the capacity of the compressors you will need. For example, when using 2 auto drains, 1.5 kW (200 l/min (ANR)) of the compressor capacity is required. Operating pressure: 0.1 MPa or more.

Return Filter FH100 Series

Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70

HAW

100 100 200 120 140 140 140 220 193 193 238 289 289 289 357 182 182 215 242 242 242 317 159 159 215 219 219 219 270 480 704 1056 1203 1703 1210 159 159 245 264 264 264 130 130 165 216 216 216 35 35 37 80 150 150 72 190 390 575 893 1038 1538 950 35 35 138 170 276 276 365 203 203 266 324 324 324 473 83 83 212 258 366 366 500 1 2 1 2 1 1 2 2 3 1 1 1 1 1 1 4 267.3 18

Series HAW Water Cooled Aftercooler 1

100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8

Compact Cylinder with Solenoid Valve/

speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 7 Fully opened 0 0 1 2 3 4 5 6 7 8 9 10 Without restrictor Without restrictor Number of restrictors needle rotations Fully opened Number of restrictors needle rotations Restrictor: ASN2-M5 Pressure: 0.5 MPa Mounting orientation: Horizontal, No-load, Piston extended The above piston speed

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

90

Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80

Digital Flow Switch (Remote type sensor unit)

PF2A510 1 10 PF2A550 5 50 PF2A511 10 100 PF2A521 20 200 PF2A551 50 500 -22No.PF-OMO0010-C Dimensions (in mm) PF2A510/550 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3 mm -23No.PF-OMO0010-C PF2A511/521/551 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3

70pvvna

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Valve size Valve type Port size Rated voltage A: Non-locking extended type Orifice size (mm) Symbol Symbol Symbol 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C. N.O. C.O.

Clean Regulator

400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure