VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

TM

(inch) 4 6 8 10 12 Accessory Model TM-04 TM-06 TM-08 2 x 6 T TM-04 TM-06 TM-08 TM-10 TM-12 2.6 x 8 4 TM-10 VMG 3 x 8 TM-12 Dimensions: Multi-tube Holder (Pitch) N-holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

AY Series

(Dallas) '12801 N Stemmons FrwY, Suite 815 Dallas, TX 75234 Tel: (972) 406-0082 reX: lSzZ; +OO'sSOa SMC Pneumatica Inc' (Au3tln) 2324-D Bidgepoint Drive Austin, TX 78754 Tel: (512) 926-2&6 FAX: (512) 926-7055 FAX: (615) 331'9950 SUC Pneumatlca Inc. (Tampa) SilC Pneumatlcs Inc.

Series VS

N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T 57 65 19 17.5 15.5 27 187.5 174.5 58 19 14 26 19 40 234 221 76 27 12 Series VSR/VSS8-4 How to Order Valve (ISO15407-2)

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

PA3000/5000

type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are options.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000

Stations Option 01 None DIN rail length specified Back pressure check valve Nil 02 to 16 (1) Double Wiring 08 8 stations B (2)(3) Note) Max. 16 stations (Special wiring specifications) K (4) Special wiring specifications (Except double wiring) With name plate (Side ported only) External pilot specifications Built-in silencer, direct exhaust N R S Note 1) Specify DIN rail length with D at

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: R (Right to Left)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Stations: 6 Stations, Port Size: 02 (Rc1/4), Thread Type: N (NPT), Kit Name: SDZEN (EtherNet/IP), SI Unit COM: N (-COM), Number of Input Blocks: 2 (Input Block 2 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: N [NPN (-)]

LC-OM089xx

Timing chart 100% 100% OFF OFF OFF Warning ON ON ON APH ASE Thrust SET O N 3 SET Input adjusted thrust OFF:100% thrust(Max.)

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

3 Way Direct Acting NVKF 300 Series

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

LZ-OM004xx

L[]ZC[]3L[][][]A3 L[]ZC[]3M[][][]A3 L[]ZC[]3H[][][]A3 L[]ZC[]5HRated thrust (N) 196 or m ore 117 or m ore 72 or m ore Rated thrust (N) 80 or m ore 43 or m ore 24 or m ore Available stroke (mm) 1 200 (Std. stroke : 25/40/50/100/200 Available stroke (mm) 1 200 (Std. stroke : 25/40/50/100/200 [][][]A5 Feed screw lead (mm) 2 6 12 Feed screw lead (mm) 2 6 12 L[]ZC[]5MMounting direction Horizontal

Series AP3500

UNF thread Side Bottom mount 0.06 in3 (1.07 cm3) 1.8 lbs (0.82 kg) 3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Mass LOTO (Lockout) NPT 1/8 inch Top NPT 1/8 inch Top 1.5 lbs (0.68 kg) 3) Option (Part number: AP PL 210) 4) 1.5 lbs (0.68 kg) 3) N/