SMC Corporation of America
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Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Besides, be certain that a retaining ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 75 Compact Cylinder/Anti-lateral Load Series CQ2 Replacement Procedure is 32, 40, 50 63, 80, 100 P.290 Construction Standard !3 !2 !1 !2 !1 !

) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location Nil X1 2 position 3 position Function 2 position

How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

6 1 1 Bowl assembly O-ring NBR 1: 100 VAC, 2: 200 VAC, 4: 220 VAC, 5: 24 VDC, 9: Others 14-13-18 5 Booster Lube Series ALB900 Dimensions Pressure differential adjustment screw Relay valve F.R.L.

12 (Both sides) 4-M8 x 1.25 thread depth 14 Mounting thread Open 23 Closed 2 MHZ MHF MHL MHR MHK MHS Finger closing port Rc 1/4 Finger opening port Rc 1/4 MHC MHT MHY 4-M10 x 5 bottom hole dia. 8.6 MHW 4-M10 x 1.5 thread depth 12 Mounting thread Thread for mounting attachment MRHQ MHT2-63D Misc.

Local Area: (800) 258-9200-www.stevenengineering.com MHS Finger closing port Rc 1/4 Finger opening port Rc 1/4 MHC MHT MHY 4-M10 x 5 bottom hole dia. 8.6 MHW 4-M10 x 1.5 thread depth 12 Mounting thread Thread for mounting attachment MRHQ MHT2-63D Misc.

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.

() S O 45 () 45 () O O CAUTION Check that air pressure is zero before servicing. 4 3 5. 5 5.1 3 ON OFF 60cm 1 10% () ( ) 60cm 1 10% 3 5 1 5. ( ) 60cm 1 2 IN OUT INOUT () 5 2 6. 6 6.1 IDF15E1-10 IDF15E1-20 550 MPa 0.151.0 () 240 (85%) 50Hz 2.8 (ANR) 1) 60Hz 3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz

4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

Straight type Stroke Air supply unit Note 1) 200 250 300 350 400 450 500 600 1000 200mm 250mm 300mm 350mm 400mm 450mm 500mm 600mm 1000mm Qty. None 1 set 2 sets Description Symbol Nil AS AW A unit (Air system 1) Note 1) Air supply unit, 1 set breakdown: Supply block (slide table side) 1pc. Supply ring (plate side) 2pcs. The maximum produceable stroke is 5000mm.

1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000

Body Output for PF2A3 + Analogue (1 to 5 V) type: PF2A5 -1Output for PF2W3 + Analogue (1 to 5 V) type: PF2W5 -1Safety Instructions Model Width across flats of attachment Piping port (IN side) Bracket Sensor Monitor PF23 PF2A510 : This drawing is the model of PF2W504/520. 24 mm These safety instructions are intended to prevent hazardous situations and/or equipment damage.

The method is as above in (1), (2). 147m/s2 3 times each in direction of X, Y and Z respectively (De-energized) Impact resistance 1 The operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment.