HEC_W-E

Approx.1200W(water), 800W(Fluorinert FC-77) Cooling capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Approx.2200W(water), 1500W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN

10

3 to @4 are at room temperature (20 to 25C). Type of Impact Load Free fall impact Check Model Selection Step z to c prior to use. Graph !3/RJ06 Graph !5/RJ10 Graph !

Digital Flow Switches Series PF2A

) 3% F.S. or less (0 to 50C, based on 25C) Temperature characteristics Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3 Output for display unit Resistance Output Note 2) specifications Voltage output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

MHZ

MHZ2-25C/MHZL2-25C MHZ2-6C/MHZA2-6C 140 Pressure 0.7 MPa Pressure 0.7 MPa 8 120 0.6 MPa 0.6 MPa Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 100 6 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa 80 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa F 4 60 0.3 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 2 0.25 MPa 0.25 MPa 20 0.3 MPa 0.3 MPa 0 10 20 30 0 20 40 60 80 100120 Gripping point L (mm) Gripping point

MHZ

MHZ2-25C/MHZL2-25C MHZ2-6C/MHZA2-6C 140 Pressure 0.7 MPa Pressure 0.7 MPa 8 120 0.6 MPa 0.6 MPa Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 100 6 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa 80 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa F 4 60 0.3 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 2 0.25 MPa 0.25 MPa 20 0.3 MPa 0.3 MPa 0 10 20 30 0 20 40 60 80 100120 Gripping point L (mm) Gripping point

Large Size Vacuum Module: Series ZR

(Based on 25C) Enclosure Operating temperature range Operating humidity range Withstand voltage Temperature characteristics Note 1) When analog voltage output is selected, analog current output cannot be used together. Note 2) When analog current output is selected, analog voltage output cannot be used together.

Low Differential Pressure Sensor

(not including sensor accuracy), Response time: 150 ms or less Accuracy (to display value) (25C) 1.0% F.S. or less 1.5% F.S. or less 2.0% F.S. or less 0.5% F.S.

Electronic Pressure Switch Series (Separate Type)

(10 to 60C: based on 25C) 2% F.S. or less (25C) 3% F.S. or less (25C) Temperature characteristics 0.2% F.S. or less 1% F.S. or less Repeatability 0.3% F.S. or less Hysteresis Output Display (Resolution) IP40 IP65 IP40 Enclosure Note Page 16-3-1 16-3-33 16-3-23 16-1-2 2 Electronic Pressure Switch Series (Separate Type) Model Selection Table Controller PSE300 PSE200 Model Sensor input amount

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

70pvpump

) 3% F.S. or less (10 to 60C: based on 25C) 2% F.S. or less (25C) 3% F.S. or less (25C) Temperature characteristics 0.2% F.S. or less 1% F.S. or less Repeatability 0.3% F.S. or less Hysteresis Output Display (Resolution) IP40 IP65 IP40 Enclosure Note Page 16-3-1 16-3-33 16-3-23 17-5-176 36 Electronic Pressure Switch Series (Separate Type) Model Selection Table Controller PSE300 PSE200 Model

PF2D

(at 25C water) Repeatability 1% F.S.

Refrigerated Air Dryers Series IDF/IDU

Trace the arrow mark, starting from F for cooling temperature 25C (pressure dew point 25C) to obtain the intersection G on the pressure characteristic line for 0.7 MPa. 8. From the intersection G, trace the arrow mark to obtain the intersection H on the vertical axis. 9.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Viscosity: 3mPas (3cP) or less Detection style Karman vortex Rated flow range 0.4 to 4 l/min 1.8 to 20 l/min Note 1) 4 to 40 l/min Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5% F.S. or less (at 25C water) Repeatability 1% F.S. or less (at 25C water) Temperature characteristics 5%

Lightweight and Compact

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

HRS100/150

Tap Water (as Facility Water) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Make-up water Influence Item Unit Standard value Corrosion Scale generation pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Item Unit Standard value Influence Standard item Chloride ion (Cl)

energy saving effect

Item Unit Standard value Influence Protection Circuit Corrosion Scale generation pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v Caution Standard item If operating in the below conditions, the protection circuit will activate and an operation may not be performed or will stop

53

Protection Circuit Item Unit Standard value Influence Corrosion Scale generation Caution pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v If operating in the below conditions, the protection circuit will activate and an operation may not be performed or will stop.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the arrow mark, starting with F for cooling temperature 25C (pressure dew point 25C) to find the intersection G on the pressure characteristic line for 0.7 MPa. 8. From the intersection G, trace the arrow mark to obtain the intersection H on the vertical axis. 9. The intersection H is the amount of water included in the compressed air 1 m3 at 0.7 MPa, pressure dew point of 25C.

HRX-OM-X037

Item CH1 CH2 Setting range 5 to 35 10 to 40 CH2 set temperature CH1set By default 20 25 temperature [Tips] Sample set temperature: To change from CH1SP: 25C and CH2SP: 30C status, to CH2SP: 15C, first set CH1SP to 15C and then CH2SP to 15C. If CH2SP is set to 15C before setting CH1SP to 15C, then the following message appears: Please set CH1SP first.