Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators 2 position single (24 VDC) 10-SQ1131-51-C6 (4 sets) 2 position double (24 VDC) 10-SQ1231D-51-C6 (4 sets) Blanking plate SSQ1000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side D side 3m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting Manifold base (9 stations) 10-SS5Q13-09FD2-D F kit (D-sub connector kit)

CP95

7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16

Vacuum Unit

stations Release valve 9 10 5 stations Release valve 18 Supply valve Supply valve 6 11 12 6 stations Release valve 6 stations 19 Release valve 7 Supply valve 13 14 Supply valve 20 7 stations Release valve 7 stations Release valve 8 15 16 Supply valve Supply valve 21 8 stations Release valve 9 8 stations Release valve 17 18 22 Supply valve Supply valve 10 19 20 9 stations Release valve 9 stations

Vacuum Pad

Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

CP95

9 i *1 *1 C95K32 A A-A A !2 !

EXxx-OMN0037CN

8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4

K35-OMW0030

7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value 32 (7) IN-777-250TF-450F*-HL (8) IN-777-320TF-200F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (9) IN-777-320TF-350F*

Step Motor Driver （ Pulse input type ）

Driver I/O type "NPN type" Driver version "V1.00" NPN V.00 (8) (9) ARX8300073 (10) Serial No.label of driver version A Side No.

Fieldbus system Analog unit

32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB -21No.EX-OMN0038-C (2)Signed binary data format and twos complement data format Input signal range: 0 to 10 V, 0 to 5 V, 0 to 20 mA Input signal range: 1 to 5 V

CEx-OMB0060

Data setting range Mode Setting items Setting range Default value Count None None None Preset (1) Preset No. 1 to 31 1 (2) Preset value 9 to + 9 + 0 (3) Upper limit 9 to + 9 + 0 (4) Lower limit 9 to + 9 0 (5) Preset output form 1SHOT/ HOLD/ 1SHOT COMPARE Function (1) Pre-scale Connecting model CEP1/ CE1/ MANUAL CEP1 Multiplication 124 4 Count value per pulse 0.01 to 9 0.01 Decimal point position

Mechanically Jointed Rodless Cylinder Series MY2

6 @9 #8 MY2H16 MY2HT16 @3 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 $6 !1 $1 #0 r $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Electric Actuators

4 Nickel plated 8 Bearing stopper Motor plate Guide ring Bearing Bushing Soft wiper Anodized Size 10 only 9 10 11 12 13 !2 e w i !1 t !

2/3 Port Valve for Various

./31 + + + + 4; .1 + / .31 + 9$ :# 9$ :# 9$ 9$ :# :# + + //4; .1 9$ :# 9$ :# 9$ :# 9$ 9$ :# :# + + //4 .;1 9$ :# 9$ :# 9$ 9$ :# :# + + .31 // / / $ $ * # $ *# ? ?# * $ $ *# # $& : /78 & Air Operated Valves List # $ # $ $ )=/4 # $ $ )=/4 % ($ && && &'& &'& &'& ($ &'& )* + + !

DOC1020530

is displayed. -9 to 9 mm 10STM 4 Cumulative feedback pulses Feedback pulses from the motor encoder are counted and displayed.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

A-HEC-OM-J004

Content 5 2 1 HEBC002-WA10 HEBC002-WB10 1 RS-485 T/R(A) Unused 2 RS-485 T/R(B) RS-232C RX 3 Unused RS-232C TX 9 6 4 Unused Unused 8 7 5 Unused RS-232C SG 6-9 Unused Unused Communication connector D-sub 9 pin (female) 7.3 Specifications of Connectors 7-7 A_HEC-OM-J004-4 Chapter 7 Appendix 7.4 Communication 7.4.1 Specifications Table 7-2 Communication Communication type HEBC002-WA10 HEBC002

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(9) IN1 (3) INP output turns off. PLC (6) (4) BUSY output turns on. OUT0 (14) (5) Turn off DRIVE input.