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50140 mm stroke with lever unit F 0 None 1 30 psi 2 45 psi 3 150 psi Gauge and Pipe Port Nil PT Position Indicator (5100) N NPT 0 None F PF 1 WIth Ambient Temperature Nil -2 80C T -5 100C L -30 60C EXTERNAL FEEDBACK LEVER The feedback lever is selected according to valve stroke.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

HAA

8 B 3 8 B 1 2 Thermometer for outlet air temp.

Stainless Steel Regulator Series NSR

Fftdd/Diapnr.gm Malerbl (NSR1O0O) 0Deionized water, Watsr, Air, N2gas, O2gas Fluoro rubber & Fluoro resin lining 1-Deionized water, Water, N2gas, 02gas Fluoro rubber S_tting Prr&9ure 0-Lov,/ Pressure Model (1.5-3op.sig) 1-Hish Pressure Model (7 ' 1 oopsig) ( sR3O00,4000) 0Pure water, Water/Fluoro rubber A Fluoro resin lining 1-Air, N2gas, 02$s/Fluoro rubber 2-Air, N2gas, 02gas/nuoro rubber

Bore sizes range from 7/16" to 2" and standard strokes from 1/2" to 12". Double acting single rod ; Bore sizes (inch): 3/4, 7/8, 1 1/16,1 1/4, 1 1/2 ; Mounts: nose, rear, double end ; Low temperature option (XB7) temperature range -22°F to 158°F ; High temperature option (XB6) temperature range -4°F to 300°F

Bore sizes range from 7/16" to 2" and standard strokes from 1/2" to 12". Double acting single rod ; Bore sizes (inch): 3/4, 7/8, 1 1/16,1 1/4, 1 1/2 ; Mounts: nose, rear, double end ; Low temperature option (XB7) temperature range -22°F to 158°F ; High temperature option (XB6) temperature range -4°F to 300°F

Swivels

Port 1 Port 2 B Port 2 PS2410202-20-20 4.67" 3.38" 2.63" 2.88" 1 1/4-11 1/2 1 1/4-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF PS2410202-24-24 4.67" 3.38" 2.63" 2.88" 1 1/2-11 1/2 1 1/2-11 1/2 118.6 mm 85.9 mm 66.7 mm 73.0 mm NPTF NPTF Port 1 PS3210202-32-32 4.88" 3.58" 3.06" 3.35" 2-11 1/2 2-11 1/2 123.9 mm 90.8 mm 77.6 mm 85.1 mm NPTF NPTF Dia Wrench Flats Quick Coupling Division 8145

KJ

Red 1 4 1 8 3 16 3 8 1 2 07 1 4 1 4 3 8 Nil VMG 09 5 16 11 3 8 1 2 13 1 2 Same dia. rod Same dia. tubing 1 8 tubing tubing 5 32 tubing 3 16 tubing 1 4 tubing 5 16 tubing 3 8 tubing 1 2 Model Male connector Straight Different dia. straight H Hexagon socket head male connector S F Female union Male elbow Elbow Plug-in elbow Reducer elbow 45 male elbow L K V VS VF LF VD VT Z ZD ZT W Universal

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug

VQ7-6/7-8

Compatible cable Cord outside diameter: 6.8 to 10 ZNR 1 (4) DC: Single COM 3 (1) SOL.B SOL.A ZNR ZNR 1 (4) 2 (2) DC: Double 3(1) ~ + SOL.A ~ ZNR 1(4) 100VAC: Single COM ~ ~ 3(1) + + SOL.A SOL.B ~ ~ ZNR ZNR 1(4) 2(2) Holding screw 100VAC: Double 3(1) Ground nut ~ + Housing SOL.A Washer ~ ZNR Grommet (rubber) 1(4) 200VAC or more: Double COM + ~ ~ 3(1) + Terminal block SOL.A SOL.B ~ ~

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

AC Servo Motor Driver (MECHATROLINK-III type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYU Operation Manual (Simplified Edition),section 4.4.1.

Precision Regulator

, NBR 1 1 P36203009#1 P36203009#1 17 Valve Brass, NBR 1 1 P36203010#1 P36203010#1 18 Damper NBR, other P36201021 1 1 1 P36202026 P36202026 19 O-ring H-NBR 2.5 x 1.05 3 2 2 1.42 x 1.52 1.42 x 1.52 20 O-ring NBR 3 1 3 1 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 21 O-ring NBR 10 x 1.3 1 1 1 1 1 JISB2401P11 JISB2401P11 27.8 x 1.5 27.8 x 1.5 22 O-ring NBR JISB2401P5 Note 2) JISB2401P5 Note

SFOD-OMT0011CN

1) FileViewWindowHelp (1-1-1) File (F) Print Alarm save Software Exit (1-1-1-1) Print [] a) Step DataParameterTest Drive Alarm 9 No.SFOD-OMT0011CN-A Step No.

SFOD-OMT0012

There are four commands: "File", "View", "Window" and "Help". (1-1-1) File (F) This is used to print the screen, save the alarm, and close the setting software. There are three commands: Print, Alarm save and Software Exit. (1-1-1-1) Print This selects the object to be printed.

Serial Transmission System Series EX250 Series EX500

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

EXxx-OMN0029CN

1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -59No.EX-OMN0029CN-D SI ([ ](20 )) 0 0 byte 1 4 byte 2 (10 ) 6 byte (64 ) 12 byte 3 3 -60No.EX-OMN0029CN-D EX600 0 1 2 3 4 5 AXA DYB DYB DXB DXD SDNA SI (32 ) 4 byte 1 byte 1 byte 1 byte 2 byte 4 byte (EX600-AXA)_4 byte(0) (EX600-DXB)_1 byte

AS-FG/ASD-FG

1710 1.5 2.7 3.5 4 6 7 10 12 14 12 26 Effective area mm Note) The flow rate values are at a pressure of 0.5MPa and temperature of 20C. 1 Series AS-FG How to Order AS 2 1 1 3 F G 01 06 Body size Option 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

IR1000/2000/3000

4 Rc 1/4, 3/8, 1/2 Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/8 Port size Rc 1/8 (2 locations) Pressure gauge port Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 0.30 0.14 Weight (kg) Note 1) With the condition of no flow on the output side.