o .@ (53) 2.50 (63.s) 2.91 3.33 \74) (84.5) 3.74 4.15 (95) (105.5) 4.57 (116) 4.94 (126.5.) 5.39 (137) 5.81 (147.5) 6.22 (158J 6.63 (168.5) 7.O5 (1791 7.46 (189.s) 7.47 (200) 8.29 (210.5J a.70 (.2/,) 9.11 (231.5) L2 1.32 (33.5) 1.73 \44) 2.15 (54.5) 2.ffi 2.97 3.39 (86) 3.80 (96.5)4,21 (i07) 4.63 (117.5) 5.04 (128) (138.51 (149J 6.28 (i59.5) (170) 7.11 (180.5) (191) 7.93 (2or.s) 8.35 4.76 \
Corner: R3.5 or less 387 PF2D Series Dimensions: Remote Type Monitor Unit for Deionized Water and Chemical Liquids (4-channel Controller) PF2D200/201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel Panel fitting dimensions 55 or
Corner: R3.5 or less 311 A Series PF2W Dimensions: Remote Type Monitor Unit For Water (4-channel Flow Monitor) PF2W200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mount adapter 53 9.4 (2) 47 42.4 46.4 Panel mount adapter Front protective cover Waterproof seal Panel Panel fitting dimensions 55 or more 37.5 +0.1 -0.2 R1
RBQC With bumper RHC MK(2) (mm) RS Q G Model Basic type With bumper Shock absorber h Hexagon nut B G LL S F D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 E 6 10 12 16 18 MM C 22 27 32 41 41 K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52 61.5 76 27 37.5 44 53
22.5) 0.5 (43) 2.5 U side D side Stations 1 2 3 n DIN rail clamping screw 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53
57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2 20 12.5 (mm) JC JD JJ JK JU Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 70 100 200 M12 x 1.75 18 M8 x 1.25 10 M20 x 1.5 53
Terminal DC (+) 7 Green : CH4_OUT1 DC () 6 Red : CH3_OUT1 CH1_OUT1 5 Gray : CH2_OUT1 CH1_OUT2 4 White : CH1_OUT2 3 Black : CH1_OUT1 CH2_OUT1 2000 2 Blue : DC () CH3_OUT1 1 Brown: DC (+) CH4_OUT1 Auto shift input 16-3-8 8 Series PSE200 Multi-channel Controller Dimensions Front protective cover + Panel mount 53 9.4 (2) 47 42.4 ZSE ISE MPa kPa PSE 46.4 OUT1 OUT2 1 2 3 4 Z I SE3 CH PRESSURE PS
port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series MXU Dimensions: MXU6 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 45.5 46 37.5 14 20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53
Guide MXZ Series Compact Slide MXH Series (Linear guide) Height (Overall length) Compact Guide Cylinder MGPM Series (Slide bearing) MGPL Series (Ball bushing) Compact Cylinder with Linear Guide MXZ Series (Linear guide) Guide Rod Type Compact Cylinder CQM Series (Slide bearing) Deflection Compact and Space-saving Height/at 10 mm stroke [mm] Depth Width Bore size MXZ MXH MGP CQM 12 44 56.51 53
Min. bending radius mm Note 3) Length 20m 100m Specifications Operating fluid Max. operating pressure Burst pressure Operating temperature Material inner tube Material Hardness Air, Water Note 1) 145psi (1MPa) at 68F (20C) Note 2) Refer to burst pressure characteristics chart Air: 4 to 140F (20 to 60C), Water: 32 to 140F (0 to 60C) Nylon 11 PVC (Equivalent to UL94, standard VO) Shore D 53
3 (R) Port 1 (P) ARM ARP G1/2 Applicable cable O.D. 6 to 12 IR IRV 112.2 99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51 35 VY1 9 53
External pilot type VFM351 type With foot bracket VFM350-02--F 2-4.5 mounting hole (External pilot port) 5-6-53 5 Port Mechanical Valve Metal Seal Series VFM200 Compact design, large flow capacity 18 mm2 Specifications Fluid Air/Inert gas Operating pressure 0.1 to 1.0 MPa (1) High cycle rate, long life/300 c.p.m. or less Piping possible to any EXH port.
For Actuator Precautions on Series CVS1, refer to page 10-15-53 because they are the same as those for Series CV3. 1. Each switch and mounting style of cylinder has different minimum mountable stroke. Be careful especially of the center trunnion style.
cushion) Port size M5 x 0.8 Rc 1/8 Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYP15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYP32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Magnetic holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.1 15 35 53
VK300-82-2-01 VK300-82-2-02 VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 1578
base VV4Z1-21P 3-3-14 4 Port Solenoid Valve Body Ported Series VZ1000 Type 20 Manifold VV4Z1-20Station 1(Mounting hole) Grommet (G), (H) VK VZ VF Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) (3 port valve) VFR (A port) VP4 VZS VFS (Pitch) (Mounting hole) VS4 4-Rc 1/8 (P , R port) (A, B port) VQ7 EVS VFN 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) (mm) Stations 2 3 53
Applicable cable O.D. 3.5 to 7 (Lead wire length) MAX. 10 : With light/surge voltage suppressor 3-3-45 Series VZ3000 Type 42 Manifold: Side Ported VV5Z3-42Station 1-01 Manual override (Non-locking) Grommet (G), (H) M5 x 0.8 (PE port) (Pitch) (Mounting hole) 4-Rc 1/4 (1(P), 3/5(R) port) G: 300 mm H: 600 mm (Lead wire length) (Pitch) 24.5 P=17 (4(A), 2(B) port) 2n-Rc 1/8 (mm) Stations 2 3 66 53
With lead wire (Length 300 mm) MN: Without lead wire D: With connector G: Lead wire length 300 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm Light/Surge voltage suppressor Nil None Z With light/surge voltage suppressor With surge voltage suppressor S Not available for GZ, HZ and DOZ Type LN, MN: With 2 sockets. 3-3-53
L 62 6 9 12 15 18 21 24 27 30 33 36 39 42 45 47 50 53 56 59 785.5 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting the manifold on the DIN rail. DIN rail mounting bracket is attached on the manifold. 1 set of DIN rail mounting brackets for 1 manifold includes 2 brackets.
wire length) SY P = 1011.5 300 300 (Lead wire length) 43.3 37.2 12.5 7.5 43.3 SYJ U side D side 1 2 3 4 5 n (Lead wire length) VK For latching and AC VZ VT VP Type M W 35.1 32.4 Type L H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 VG Latching type 100 VAC or more 16.4 A A VP n-M5 A port Formula: L1 = 10n + 13, L2 = 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53