3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Digital Flow Switch (Integrated display type) ( compatible)

min (4 L type) [008.0] 008.0 L/min (16 L type) [020.0] 020.0 L/min (40 L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_1] Set value (OUT1) Page 38 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_1] Hysteresis (OUT1) Page

JXCx-OMT0034CN

Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8] 1 030 10% Bit[70] 1 0255 mm/s RWwn+7 1) Bit[F8] 1 030 10% Bit[70] H RWwn+8 1) 2 065500 0.01mm Bit[F8] L ID2 RWwn+917 ID1 ID3 RWwn+1826 ID1 ID4 RWwn+2735 ID1 ID5 RWwn+3644 ID1

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

(Fixed SI unit [l/min or l] will be set for switch types without unit switching function.) Note 3) The system accuracy when combined with PF2D5.

Guide Table Series MGF

L Y59AL 5m .

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Screw[B] Refer to (a) Belt Pull tension Model Belt N Part number LEG25 LE-D-15-1 19 LEG32 LE-D-15-2 30 LEG40 LE-D-15-3 (a) Model Screw type Screw size Tightening torque [Nm] LEG25 Cross recessed binding head screw M3x6 0.63 LEG32 hexagon socket head cap screw M4x10 1.5 LEG40 hexagon socket head cap screw[A] M2.5x10 [Tightening torque 0.18Nm] 7."

CE2

RR U Z CZ TDe8 15 10 15 224.5 80 100 9 71 16 299.5 29.5 85 117 12 60 42 76.5 30 10 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D18 12 15 81 38 95 127 248.5 70 90 50 110 9 12 19 328.5 12 88.5 35 + 0.070 0 + 0.3 + 0.1 0.032 0.059 25 16 18 148 263 11.5 101 352 49 110 15 86 105 59 130 106 40 16 23 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 20 25 140 192 297 18 102 130 76 160 13.5 119 112.5 48 20 28 403

CE2

TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084

-fl Seies

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

4-channel Flow Monitor (Remote type monitor unit)

min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 255 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1 2 5 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

ZSE F/ISE

Panel mount E Lead wire length 3 m L Panel mount + Front protection cover F Analog Output Suitable model: ZSE50F/ISE50--22/62(L)-(M) Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) Unit specification 5 5 Note 1) Nil M With unit switching function Note 2) Fixed SI unit 1 1 Note 1) Under the New Measurement Law, which has been in effect since October, 1999, sales

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

Digital Pressure Switch

Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

DO w DI Blue L e L 10 ISE7m/7mG Series Dimensions Without bracket Bracket A (Interchangeable with ISE70/ISE75(H)) (Part no.: ZS-50-A) 48 49 10 (40.1) 34 (26) 15 14 6.5 80.4 70.4 (11.4) 8 1.6 46 25 60 Bracket B (Part no.: ZS-50-B) 49 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no

VK3000

Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1

VK3000

Corresponding mark ( ) Corresponding mark ( ) Pg7 69.9 Manual override (Non-locking) ~ = 300 77.4 Applicable cable O.D.: 3.5 to 7 (Pitch) 2n x M5 x 0.8 (A,B port) L Dimension n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411