LFE-OMZ0012

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 14 Revision 18-Aug-2020 Revision D Completely revised by format change.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

XMC/XYC Series

Place the O ring on the O ring mounting surface. 14 XM-OMP0002-A Step 5 O ring Bellows holder Wipe off any dust from the valve seal O-ring and the bellows holder surface.

Return Filter

1 / 17 FGX-OM-F001-A PRODUCT NAME Return Filter MODEL / Series / Product Number FH100 Series FH100 X0 Series 2 / 17 FGX-OM-F001-A Contents Safety Instructions 1 1.How to Order 9 2.Construction and names of individual parts 10 3.Specifications 11 4.Installation and Piping 12 5.Maintenance 13 6.Maintenance parts 14 3 / / 17 FGX-OM-F001 FGX F001-A Return Filter Return Filter Return Filter Safety

MHx-OMZ0003

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

LV50-OMQ0004

Doc.No.LV50***-OMQ0004-F Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0004-F Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 15 Installation 16 Piping Method 17 Wiring 19 Maintenance and Inspection 21 Troubleshooting

Air cylinder

Description Note 1A Rod cover 1B Seal retainer 6 only 2 Head cover A 3 Cylinder tube 4 Piston rod 5 Piston A 6 Piston B 7 Bumper A 8 Bumper B 9 Rod seal 10 Piston seal 11 Tube gasket 12 Wear ring 13 Mounting nut 14 Rod end nut 15 Magnet 23 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

CYBx-OM0001H

With floating joint 13 Internal Construction and Parts List A 14 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

XMA/XYA Series

. 2012 SMC Corporation All Rights Reserved 14 XM-OMP0001-A

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

AS-FPQ/AS-FPG

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

PA3145/3165/3185

52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

VT307

Function plate (With gasket) Note) DXT152-14-1 Mounting screw NXT013-3 Qty. 1 pc. 2 pcs. A B Note) DXT060-51-13B, DXT152-14-1B are for energizing continuously.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 NBR Gasket AXT333-14 AXT333-14 AXT333-14 !2 NBR Gasket AXT333-15 AXT333-15 AXT333-15 !3 NBR Gasket AXT334-7 !4 NBR Gasket ( ): For DC !5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.

Magnetically Coupled

for slider Theoretical thrust (Ibf) X210 Oil-free exterior specification 150 8 20 (3/4") X322 Outside of cylinder tube with hard chrome plating X324 Oil-free exterior specification (with dust seal) 6 15 (5/8") 100 X1468 Interchangeable specification with NCY2B6 4 XC24 With magnetic shielding plate 50 XC57 With floating joint 2 6 (1/4") Minimum Operating Pressure 0 25 50 75 100 0 25 50 75