VCB

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

R.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut

•

l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Circuits and Wiring Examples p. 9 Options/Part Nos.

Title not found

P/N 3/8 B5 x 2 3/8 B5 x 3 3/8 B5 x 4 3/8 B3 x 2 #2 1/2 Barb P/N 3/8 B2 1/2 x 2 3/8 B2 1/2 x 3 3/8 B2 1/2 x 4 3/8 B2 1/2 x 5 3/8 B2 1/2 x 6 3/8 B2 1/2 x 7 #3 Barb P/N 3/8 B3 x 2 3/8 B3 x 3 3/8 B3 x 4 3/8 B3 x 5 3/8 B3 x 6 #4 Barb P/N 3/8 B4 x 2 3/8 B4 x 3 3/8 B4 x 4 3/8 B4 x 5 Thread Size 1 Barb # (Size) Quantity of Barbs Part Numbering Example 52 Available with #1, #2, #2

Low Friction Cylinders Series MQ

6 r t !3 w q e !5 !0 !1 !

Heavy Duty Stopper Cylinder Series RSH/RS1H

Caution Operation instructions Consult P/A when using solvents other than water.

Cylinder with Lock Series CLS

141 459 495 Packed with clevis pin, flat washer and cotter pin. 10 Series CLS Dimensions Center trunnion type/(T) BC CLS125 MODEL SMC FREE LOCK CHECK Cylinder With$ Locking Mechanism 5 30 Rc(PT) 1/4 Unlocking port (unlocked when pressurized) Z + 1/2 stroke Plug with breathing hole GC BB BA GA GA 2-Rc(PT) P 4-J Width across flats KA M MM BZ GB R TY TDe8 90 59 D W 14 AL C A K 43 N N TT B

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

11-cq2-e

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !

Ionizer

F G J Power supply cable Nil Z N With power supply cable (3 m) With power supply cable (10 m) Without power supply cable K Output specification NPN output PNP output Nil P Control unit cable entry direction Nil R Left-hand entry Right-hand entry 666 A Series IZS31 Made to Order 4 Please contact SMC for detailed dimensions, specifications, and lead times.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

ITV_D-E

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

AMX-OM-F005-C

LX2007. 10 SYM BO L J K L M N o P Q R S T U Year 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 SYM BO L o P Q R S T U V W X y Z M ont h J an Feb M ar Apr M ay J un J ul Aug Sep O ct N ov D ec 4-

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.