HRX-OM-Y098

Table 3.3-1 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker Terminal Power Recommended Cable Sensitivity block Model supply crimp Specifications Breaker of screw voltage terminal 1 size leakage diameter (A) current (mA) 4 cores x AWG10 HRL100-A-20 3-phase (4 cores x 5.5 mm2) R5.5-5 30 200V AC including (50Hz) ground M5 30 4 cores x 3-phase HRL200-A-20 40 AWG8

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, 22 lb

ITV

IR 100 VEX M12 X 1 Cable connection threads 12.5 AW AMR (11) AWM SMC REGULATOR AWD ITV2000 ITV VBA 93 Rc(PT) 1/4 Exhaust port Solenoid valve EXH VE OUT 19 13.5 EXH (3) SUP (1) OUT (2) VY G 12 AL Flat bracket P3020114 (optional) m36 2-Rc(PT) 1/4, 3/8 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 19 R3.5 15 25 m36 7 2-Rc(PT) 1/4, 3/8 SUP port, OUT port L-bracket INI-398

GA342

(Breathing port) Switching plate M5 x 0.8 EXH side (2 port: Plug) Outlet side (Mounting holes) N.O. Inlet side Take sufficient precations and confirm safety when changing the flow path and restarting after the changes. 2. Other M5 size hole at the left side of the adapter plate is a breathing port for spool valve. Do not plug or tighten it.

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

VXA21/22

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

Air Cylinder RSQ Series Stopper Cylinder

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

FSQ seies

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

PSxx-OMG0005CN

) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)

High Pressure Coolant Valve

301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

x 0.8 applies to the 5mm stroke only.

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking