Ejector Valve Unit Series ZYY/ZYX 1

(l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 80 80 80 80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure 60 60 60 60 60 60 Air consumption Air consumption 40 40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3

e-Rodless Actuator

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-M9, D-M9V (With indicator light) 2-wire load current is reduced (2.5 to 40 mA) Lead-free UL certified (style2844) lead cable is used. D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U B D-F9BAL A Auto switch mounting heights (mm) D-A7H D-A80H D-J79 D-J79W D-F7 D-F7F D-F7NTL D-F7BAL D-F7W D-A73C D-A80C D-F7WV D-A7 D-A80 D-F9V D-F9WV D-F9BAL D-J79C D-A79W D-A9V D-F7V D-F7BAVL Bore size (mm) U U U U U U U U U 20 31 24.5 25.5 31.5 28 27 32 38 29 31.5 32.5 38.5 35 34 26.5 27 40 41.5 32.5 35 36 42 38.5 37.5 30 30.5 50 47.5 38.5 41 42 48 44.5 43.5 36 36.5 63 54 42 47.5 48.5

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10

10

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

HRX-OM-R016

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Series AS-FM/AS-M/ASD-FM

With One-touch fitting For low speed control Needle Valve/Flow Rate Characteristics AS1001FM AS2001FM AS2051FM Upstream pressure 0.5MPa Upstream pressure 0.5MPa 0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30 0.4 10 5 20 0.05 0.1 0.2 10 0 0 0 0 0 Number

Ejector Valve Unit, Series ZYY/ZYX

l/min(ANR) Air consumption flow rate l/min(ANR) -80 -80 -80 -80 Vacuum pressure Vacuum pressure Air consumption -60 60 60 -60 -60 -60 Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa Air consumption -40 -40 40 40 -40 -40 Suction flow rate Suction flow rate 20 20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

C D B A 89 Standard Motor Slider Guide Series LJ1S20 Motor Output Slide Screw 100W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1S202 1 F 2 SC Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 1 2 F R L T B Axial Right Left Top Bottom 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

180

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa MHZ 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 MHF 100 30 0.4 0.4 80 0.3 MHL 0.3 0.2 20 60 0.2 40 MHR 10 20 MHK 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm)

VNB

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

Vacuum Equipment

Tubing O.D. 9 Selection Procedure V x 60 Q Adsorption response time T1 = When the suction flow rate of 53 kPa is obtained from the ZH07DS flow characteristics graph, the leakage volume is 5 l/min (ANR). () Leakage: Adsorption flow (5 l/min) (ANR) Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) Example 2: For obtaining the discharge response time until

HRX-OM-R005

HRS060--20-(BJM) 0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With one-touch fitting For low speed control AS Needle Valve/Flow Characteristics ASP AS1001FM AS2001FM AS2051FM ASN 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 0.15 0.3 AQ Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 ASV 0.1 0.2 30 AK 5 10 0.4 20 0.05

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Nil S n Mounting Bore size B A L F G D Through-hole (Standard) Both ends tapped Foot Front flange Rear flange Double clevis 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Mounting brackets are not mounted and are supplied loose at the time of shipment.