ZM

Standard supply pressure Nil A Side/Bottom entry Side entry Vacuum switch electrical entry M S 0.35 MPa 0.45 MPa 0.5 MPa H Body style Nil L C CL CN Nil L Grommet type, with 0.6 m lead wire (ZSE1) Grommet type, with 3 m lead wire (ZSE1) Connector type, with 0.6 m lead wire (ZSE1) Connector type, with 3 m lead wire (ZSE1) Connector type, without connector assembly Grommet type, with 0.5 m lead

Ozone Resistant

Molecular structure Basic molecular structures Rubber type Basic molecular structure (-CH2-CH=CH-CH2-)x (-CH2-CH-)y I CN NBR (acrylonitrile-butadiene rubber) (-CH2-CH2-CH2-CH2-)x (-CH2-CH-)y I CN HNBR (hydrogenated nitrile butadiene rubber) Double bond Deterioration caused by ozone occurs when ozone acts on the NBR double bond to break the rubber molecules apart.

IDX-OM-W095

355 126 94 46 12.5 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFC90 13 mm IDFC80 IDFC90 IDFC60 745 957 () () 704 916 () 355 () 330 485 463 IDFC70 890 () 849 () 390 365 IDFC60/70/80/90 Series 7-3 IDX-OM-W095 7.4 IDFC60/70 CM AC230V(50Hz) AC 230V50Hz OLR FM MC PRS ILS THR C01 C11 TB IDFC80/90 CN

Round Type Hydraulic Cylinder

Bore size (mm) Y NN P S X ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 320 Round Type Hydraulic Cylinder: 3.5 MPa CHM Series Rod flange type: CHMF Width across flats B2 CHQ Width across flats B1 CHK N GA GB Rc P N Rc P 4 x FD H1 H2 2 x NN CHN CHM CHM I IA D FY B CHS MM Effective thread CH2 K F NB Width across flats

High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

Vacuum Ejector with Solid State Timer, Series ZMA

0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

IDX-OM-W094

71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094 7.4 CM IDFA60/70 OLR AC 230V(50Hz) FM MC PRS PRS2 ILS THR C01 C11 TB IDFA80/90 CN

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

GA1 GB1 2-Rc P Effective thread GA3 3 GB3 A K F NA H NB Air release Air release Air release S + Stroke ZZ + Stroke W I (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

SI Unit for Vacuum Manifold

Hysteresis H2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH0 Set energy saving operation hysteresis (H2) for each CH. Refer to Section 5.

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Vacuum Ejector with Solid State Timer

Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

High Power Cylinder Series RHC

Contents Urethane 12 50 Piston seal RHC50-PS NBR 13 63 Wear ring RHC63-PS Resin 14 Set of nos. 12 to 16 above 80 Cylinder tube gasket RHC80-PS NBR 15 100 Rod seal RHC100-PS NBR 16 Seal kits are sets consisting of items 12 through 16, which can be ordered using the seal kit number for each bore size. 5 High Power Cylinder Series RHC Dimensions/Basic Type 20 to 40 Rc P Rc P GA H2 NN NN GB

High Power Cylinder Series RHC

Contact SMC when disassembly is required. 14 Wear ring Resin CX 15 Cylinder tube gasket NBR 16 Rod seal NBR MQ RHC RZQ D-X Individual -X 1205 Series RHC Dimensions: Basic Style 20 to 40 2 x Rc P NN GB GA H2 NN H1 MM 2 x NIf8 D NE C 1.5 1.5 Effective thread length 2 x FL AL E E Width across flats KA NF 10 10 N JD A K F N JC NA S + Stroke F H WH B ZZ + Stroke (mm) A AL B C D E F GA GB H H1

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage