Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

PSE20xA.eng

Other parameter settings Front protective cover (Model: ZS-26-01) Normal operation mode Item Default setting Item Default setting [F80] Power saving mode OFF [F 3] Digital filter setting [F 4] Auto-preset function [F 5] Auto shift setting [F 6] Fine adjustment of display value 0.00 sec.

Electrostatic Sensor Monitor

Front protective cover ZS-27-01 -7No.SFOD-OMO0004-B Summary of Product parts Names of individual parts Output (OUT1) display (Green): Lit when OUT1 is ON. Output (OUT2) display (Red): Lit when OUT2 is ON. LCD display: Displays the current status of charged potential, set mode condition and error code.

VFS1000

5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 How to Order 01 VFS1 1 20 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G T Port size 01 F Rc 1 8 2 position double SJ Option 2 Mountable only for VFS1120.

VHS

7 !4 3(R) VlA !1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

Direct Operated Precision Regulator Modular Style Series ARP3000 1

(Fastening torque recommended: 7 to 9 Nm.) For sealing, use a pipe tape. ARP3000-02 VY1 G ARP3000-02BG PPA How to Order JIS Symbol AL ARP 3000 BG R 02 Option Direct operated precision regulator Nil None Reverse flow R Thread type Accessory Nil N F Rc NPT G Nil None With bracket With pressure gauge B G Pressure gauges are shipped together with regulator, (but not assembled).

Information

(mm) ASG32F-01 4 ASG42F-02 6, 8 ASG52F-03 6 ASG62F-04 Sealant: Special FKM Seat ring: Stainless steel 303 8 12 4, 6 8, 10 10, 12 Flow rate (l/min (ANR)) 460 790 920 1580 100 180 230 390 Controlled (free) flow 7 12 14 24 1.5 2.7 3.5 6 Effective area (mm2) Applicable tubing materials Note) Flow rate is measured at 0.5 MPa and 20C.

G15/G27

G27 21 (Width across flats) How to Order G 10 01 15 Option Connection thread Symbol Specifications Size R 1/8: M5 (Female thread) R 1/16 Symbol Pressure gauge 01 (1) Nil X30 Both MPa and psi R1 (2) X201 M5 (Female thread) only Size Note 1) Both R1/8 and M5 (female thread) in case of G15 type Note 2) Compatible with G27 type only Note 1) X3 (Wetted parts SUS) specifications are not available

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

GD40-2-01

ID Main Parts Material Accessory Case Internal part Window Scale plate Zinc die-casted Brass, Phosphor bronze Polyester Stainless steel Nylon tube Male connector Male elbow T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.) IDG AMG Specific Product Precautions AFF AM Be sure to read before handling.

GD40-2-01

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Air Cylinder NCA1 Series

8 1 1/8 3 1/16 5 7/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8

NCA1

/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: P (Paper, Cotton Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: N (NBR), Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]