HRX-OM-W004

HRR Series 3.1 Precautions wiring communication 3-1 HRX-OM-W004 Chapter 3 Serial communication 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Fieldbus system Ethernet POWERLINK compatible SI unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

EXxx-OMQ0016

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ Cable with M12 connector, D

ZR

Display LCD LCD with backlight LED Pressure setting range 101 to 10 kPa 101 to 0 kPa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

In-line D-M9N D-M9P D-M9B D-M9NA D-M9PA D-M9BA Electrical entry Special function Wiring (Output) Indicator light Applicable load Smbol A B C E F G 3-wire (NPN) 3-wire (PNP) 2-wire Relay, PLC IC circuit 24 V 5 V, 12 V Grommet Yes 12 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 24 V 5 V, 12 V Relay, PLC IC circuit Water resistance (2-color display) Grommet 12 V Option (For detail, refer to page

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

Cylinder with Lock/Double Acting, Single Rod Series CLS

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

Interface Regulator for VQ4000 5 Port Solenoid Valve

400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

D-A9V/M9V/M9WV/M9A(V) types cannot be mounted. Caution Since there are other applicable auto switches than listed, refer to page 388 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785. D-A9/M9/M9W auto switches are shipped together (not assembled). (Only switch mounting brackets are assembled at the time of shipment.)

VXS

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

ATX-OM-F003E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8

Regulator for 2 MPa ARX 20

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

Digital Flow Switch Series PFA For Air Series PFW For Water

Size (port size) For Air Series variations Flow rate Remote type Output specifications Port size (Rc, NPT, G) Integrated measurement Analog output Accumulated display type Switch output pulse output 1/8 1/4 3/8 1/2 11/2 1 2 Display unit Sensor unit range l/min PFA510 550 511 521 551 PFA710 750 711 721 751 703H 706H 712H P P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200

90

Flow Rate Characteristics Relief Characteristics IR1020-01-A Supply pressure: 0.7 MPa IR1020-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

Regulator for 2 MPa Series ARX20

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Screw[B] Refer to (a) Belt Pull tension Model Belt N Part number LEG25 LE-D-15-1 19 LEG32 LE-D-15-2 30 LEG40 LE-D-15-3 (a) Model Screw type Screw size Tightening torque [Nm] LEG25 Cross recessed binding head screw M3x6 0.63 LEG32 hexagon socket head cap screw M4x10 1.5 LEG40 hexagon socket head cap screw[A] M2.5x10 [Tightening torque 0.18Nm] 7."

PROFIBUS DP Compatible Fieldbus System

Green OFF COM D has no received data. COM D Green ON COM D is receiving data. NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light.