MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 37 40 160 50 140 30 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 19 22 142 110 42 45 80 35 194 170 19 Data J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9

KR

KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.

D. P. Lube ALD600/900 Series

P.

Digital Flow Switch (Integrated display type)

C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0008-C Dimensions (in mm) PF2A710/750 PF2A711/721/751 -38No.PF-OMO0008-C Lead wire and connector (Straight): ZS-37-A Lead wire and connector (Right angle): ZS-37-B Bracket: ZS-29-T Dimensions of rotating monitor part -39No.PF-OMO0008-C Made to Order Model Indication and How to Order Refer to page 10 for details of model indication and

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

VZA2000

(Value in the initial stage) VM Body ported Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Manifold Specifications

Control unit type Nil None 100 VAC, 50/60 Hz 1 Base type/Electrical entry 200 VAC, 50/60 Hz 2 5 9 Plug-in type: Stacking type manifold base with D-sub connector 24 VDC Other 51F Option Plug-in type: Stacking type manifold base with attachment plug lead wire 51G Control equipment Symbol Nil A AP M MP F G C E Non plug-in type: Stacking type manifold base 51 Air filter regulator with auto-drain

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole type)/RQB, RDQB Double end tapped type: RQA, RDQA Double end tapped RA RA mm OA threads Bore size (mm) RA OA 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 H effective thread depth C 2-P (port size) 4-N through Approx.

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

Operation and Mounting 2.1 Air Supply -P. 5 2.2 Operating Environment -P. 6 2.3 Design -P. 6 2.4 Mounting and Installation -P. 8 2.5 Piping -P. 11 2.6 Speed Control -P. 12 2.7 Shock Absorbing Mechanism -P. 12 2.8 Directional Control -P. 14 2.9 Mounting of Auto Switch -P. 14 3. Maintenance and Inspection 3.1 Inspection -P. 15 3.2 Maintenance -P. 15 3.3 Replacement Parts -P. 15 4.

Electro-Pneumatic Positioner

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

VFRA3000

+ 0.1) to 0.9, P: Operating pressure 0.1 to 0.9 3 position (0.6 x P + 0.1) to 0.9 P: Operating pressure Ambient and fluid temperature (C) 10 to 60C (No freezing.

Refrigerated Air dryer Series IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

CC

lG 1/2 1/2 223 139 92 116 123 61 121.8 156.5 98 35 18 35 109 CC100-lSl1-lG 65 86 45 88 65 1/2 3/4 CC100-lLl1-lG 259 139 92 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 3/4 CC160-lLl1-lG 319.5 202.5 144 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L dimension Mode NB Effective oil level stroke T * W S QL QB P NL 100 200 300 400 500 800 700 600 50 9.5 11 0 30 86

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Without auto switch With auto switch C H OA Bore (mm) Standard stroke (mm) A 29 29 35 39 I K L D N M OB Q RA RB T E Inch Inch 5.4 5.4 7 10 Inch #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC A 34 34 45 49 B 22 22 26 29 B 27 27 36 39 Metric 6 8 7 12 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of

Speed Controller: Standard Type Series AS In-line Type

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88