Precision Cylinder Series MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

CEx-OMQ0013

Err42 Err8 No.1ON ON ON LEDNo.10 Err9 3 P3 2 P2 Err9 Err9 ON ON ON ()5mm Err5 5mm 1 1 Err10 Err11 CPU Err12 ON 8P8 48 11-2 () 200 200 6P6 *L=1mm *200.0 1 PRG STEP P6 200 200 300mm/sec 50% 35% 49 12. 121 No. P1 No.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

] LEKFS40 Series Stroke[mm] 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Product weight[kg] 5.5 5.8 6.1 6.4 6.7 7.0 7.3 7.6 8.2 8.8 9.4 10.0 10.6 11.2 11.8 0.53 Additional weight with lock[kg] 4 - 2How to order L E K F S 32 G A 300 R1 CDH7T Motor type Size Lead[mm] Motor mounting position Symbol LEKFS25 LEKFS32 LEKFS40 Nil In-line 25 32 40 High performance R Right side parallel

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Note 5) When Nil is selected, the product will not come with a built-in magnet for an auto switch, and so a mounting bracket cannot be L E F S H 25 G B 200 C N K R1 CDH7T Motor type Lead[mm] Size Accuracy Motor mounting position Nil Basic type 16 25 32 40 Symbol LEFS16 LEFS25 LEFS32 LEFS40 Nil In-line High performance H High-precision type R Right side parallel G battery-less absolute H 20

Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

ALB900

G Note) Float switch specifications Voltage Max. cut off capacity Max. cut off current Contact Level indication 200 VAC, 200 VDC 12 VA AC, 10 W DC 0.6 A AC, 0.5 A DC 1a, 1b Bottom limit indication PPA How to Order AL ALB 900 0 0 10 S1 Float switch (Option) Booster lube Operation control signal Nil S1 S2 900 2 inch standard None 1b (Without oil ON) 1a (Without oil OFF) Body size 0 1 2 4 5

VZS2000

Note Platinum silver Platinum silver Black Black Material Aluminum die-casted q Description Sub-plate Body Thread Type Aluminum die-casted Stainless steel w e Spool/Sleeve Adapter plate Nil Standard Rc r Resin NPT N T t Resin End plate Option NPTF y Resin Piston G F Replacement Parts Part no. No.

IDX-OM-V022

Note 2: For guidance on the Fluorocarbon Emission Control Law, please visit our website below. https://www.smcworld.com/products/ja/freon/ 7.2 Refrigerant and GWP value IDF60/70/80/90 Series 7-2 J N M L O K H IDX-OM-V022 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D

Line filter

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Micro Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VAC, 50/60 Hz; 24 VDC 15 to +10% of rated voltage Class E or equivalent (120C) (5) Inrush Holding 4.5 VA/50 Hz, 4.2 VA/60 Hz 3.5 VA/50 Hz, 3 VA/60 Hz 1.8 W Plug-in type (FZ) Non plug-in type Grommet (G), Plug connector (L, M, KZ) DIN terminal (D) Apparent power (AC) Power consumption (DC) Electrical entry Note 1) Use dry air at low temperatures.

VVXA21/22

132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Trimmer Auto Switch

connector) Outside diameter [mm] 1.0 Conductor Effective area [mm 2] 0.15 (AWG26) Note) The connector for sensor (e-con connector) is not attached to the lead wire.

Pin Clamp Cylinder Series CKQ/CLKQ

F Pin hole a side a side Mounting tap: M12 x 1.75 Pin diameter: 10H7 Port Body (mounting side) C Port a side ( side) b side ( side) b side Clamp arm positioin (clockwise from top) Port a side : Mounting tap : Pin diameter : Mounting tap : Pin diameter D 180 from port Same direction as port b side Guide pin Port E 66 Port b side A C E Clamp arm Guide pin Clamp arm Port a side Mounting hole

Clean Air Module

Bushing e Check that the connecting brackets B (at two positions) are attached, and insert the bushing projection of the pressure outlet port assembly into the indent of the air operated valve assembly. Similarly, insert the end plate assembly into the pressure outlet port assembly.

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust