Digital Flow Switch

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) The maximum measuring range or change in analogue output over the maximum measurement range. F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

CRBB-OM00004

(V), 97/93A, 90/90A No.

Flow Sensor Series PFMV

Item Input voltage 0 0.7 V 5.10 V 5.20 V Voltage input range Displayable range LLL HHH Settable range PFM PFMV PF2A PF2W PF2D IF 969

Ejector Valve Unit Series ZYY/ZYX

V B A B A P1 Hysteresis setting trimmer 28 Pressure setting trimmer 28.5 25 15.8 8 Accessory (packed together) 1. Silencer (AN203-KM81 pc.) 51 26 16 2.

Free Mount Cylinder for Vacuum Series ZCUK

switch 12 V Relay, PLC Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Grommet A93V A90V A93 A90 Relay, PLC 100 V 2-wire 24 V 12 V No IC circuit 100 V or less Refer to pages 796 and 797 for the details on auto switches with a prewired connector.

60

): 190 g VHS20-:A VHS20-:B VHS20-:A VHS20-:B Safety Measure Safety Measure Can prevent accidents caused by inadvertent air supply problems.

LFE-OMZ0011

The proof pressure is double the operating pressure range. -70No.LFE*-OMZ0011 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -71No.LFE*-OMZ0011 Dimensions Note) The electrical entry

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

AC Servo Motor Driver (Pulse input type)

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

ZK2-C

DC(+) 5 4 3 2 1 A DC(-) A DC(+) OUT1 OUT2 C DC(+) C DC(-) (FUNC) B DC(-) B DC(+) DC(-) NPN PNP -14NO.ZK2-OM00801-B NPN NPN 2 , 26.4 V 80 mA 2 V (NPN ) Assy (ZK2-LWA20-A) PNP PNP 2 , 80 mA2 V (PNP ) Assy (ZK2-LWB20-A) -15NO.ZK2-OM00801-B O O 2 ( :0.080.10 Nm) () -16NO.ZK2-OM00801-B 133 A 1 1 1 1 -17NO.ZK2-OM00801-B OUT1 (P_1)ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2

ML2B

Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since

HEC_001W-E

P V < 2 3 . 0 C # 2 S V 2 5 . 0 C M O D E 2. Target temperature (no indication on display) Setting range : 10.0 to 60.0 C Min. increment : 0.1 C Indicated content : [SV] : Target temp.(Ex. : 25.0 C) Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3.

LFE-OMZ0013

Approx. 1.00 mm Colours Brown, blue, black, white, grey Sheath Material Heat and oil resistant plastic Finished O.D. 3.5 mm -63No.LFE*-OMZ0013 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

MRHQ

12 V IC circuit Grommet Solid state switch Relay PLC M9PV Yes 24 V 3-wire (PNP) M9BV 12 V 2-wire Lead wire length symbols: 0.5 m .