AS

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E KE Body size 1 AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

MQR

Low torque Metal seal type Rotary joint Series MQR 1 circuit, 2 circuits, 4 circuits, 8 circuits, 12 circuits How to Order MQR F 4 M5 Connection diameter Low torque Rotary joint (Metal seal type) M5 M5 x 0.8 Number of circuits 1 circuit 2 circuits 4 circuits 8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting

AQ

are not available. 3 4 Type Port size Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Symbol Port size Applicable series 0 5 M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 2 Note) AQ150 only AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F 554

ZMA

The tensile strength of the power cord is 49 N, and pulling it with a greater force can cause failure. 3. When handling the product, never move or loosen the switch assembly or the switch assembly mounting screws.

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

VEX-OMO0001

1. 2. 3. 4. 2 -2VEX-OMO0001 1 1 1 1 1 1 1 1 3 3 3 3) ) ) ) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () -3VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / Nm , 1.5~2 1/6~1/4 2 (P.2.3) , (P.2.3) 1 1 1 1 P P P P 2 2 2 2 A A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001 3 VEX1 3 Series 0 ON-OFF (AF ) (AMAFM ) (P.2.3) [1 P][1P] PE ( ( ( ( ) ) ) )

Smooth Cylinder Series CQSY

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

For details, refer to page 102. * S: A right-hand auto switch is shipped. ** Nil: A right-hand switch and a left-hand switch are shipped. Nil Side ported E Axial ported Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

 

LVP6 Pilot port thread (fitting) type Material Symbol Nil 1 2 N Thread (fitting) type 6 mm one-touch fitting Rc1/8 M5 x 0.8 NPT1/8 Symbol FKM EPDM O-ring material Nil N Flow sensor Option Drain valve Applicable valve type Symbol Symbol Option N.C. N.O. Double acting Process pump PA PB PA Nil None With flow rate adjustment 1 B A B A B A Air Operated Valve LVP PB N.C. N.O.

IZSE_X101

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

ZSE20(F)_ISE20

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

VP300-OMP0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm

HRX-OM-Q040_E

After mounting the particle filter bracket, tighten the M5 screws on the back of the thermo-chiller panel. Circulating fluid return port Circulating fluid return port evision 8 4 Rev.G:Oct.2019 3 8 5 3 5 4 1 1 Circulating fluid outlet port Circulating fluid outlet port Caution [HRS-PF001] [HRS-PF002] Mounting Use a long screwdriver for tightening the M5 screws.

VK300

The continuous duty AC type is equipped with a rectifier, so a diode will be provided. Construction Symbol (A)2 (R)3 1(P) Component Parts Material Aluminum die-casted No. Note Platinum silver Black Black 1 Description Cover Body 2 3 Resin Resin End cover Spool valve assembly 5 Stainless steel Return spring 4 Aluminum, NBR Black 6 Resin Molded coil 1410 A

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Digital Pressure Switch Series ZSE10(F)/ISE10 How to Order Rated pressure range ISE10 0.100 to 1.000 MPa ISE10 For positive pressure M5 A M For vacuum/ compound pressure ZSE10 M5 B M Option 3 Rated pressure range Symbol Calibration certificate Nil K p ZSE10 ZSE10F 0.0 to 101.0 kPa 100.0 to 100 kPa Piping specifications Option 2 M5 female thread/Side ported Piping port None Nil M5 Panel mount

SY3000/5000/7000/9000

5 Port Solenoid Valve Body Ported/Single Unit Series SY3000/5000/7000/9000 How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 1 8 01 SY5000 1 4 SY7000 02 02 03 Type of actuation Coil specifications 1 4 Standard Nil

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

switch J79C Connector M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9NW M9PW M9BW M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes Yes Yes Yes None None 24 V 2-wire 3-wire (NPN) 3-wire (PNP) Grommet Water resistant (2-color indication) IC circuit 2-wire 4-wire With diagnostic output (2-color indication) F79F P4DW 5 V,12 V IC circuit

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

X500 AC (50/60 Hz) 1 2 3 4 7 B DC 5 6 24 VDC 12 VDC X600 TRIAC output specification (Refer to page 14.) 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC PE port EA/EB port VF1000 VF3000 > VF5000 > A, B port size VF5000 > > VF1000 > > VF3000 > > Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 Refer to Made to Order (Page 14) when piping to PE port is required.

ZSE80/ISE80

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) None Nil 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1