Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction

Digital Flow Switch (Integrated display type)

D: Revision. E: Contents are added. F: Contents revised in several places. G: Contents are added. H: Contents are added. I: Contents revised in several places. J: Contents are added. K: Contents are added. L: Contents revised in several places. M: Contents revised in several places.[March 2017] N: Contents revised in several places.

LZ-OM004xx

D E F G H J L[]ZC[]5[] 38 58 22 27.5 L[][]ZC[]3[] 24 38 14 17 Model Model no. A B C D 41 Directly mounts onto the rod cover Tightening torque of accessories (foot) Fix with 4 holes "D" as shown below. Fix with 4 holes "H" as shown below. 42 Foot m ounting 4. Mounting end for tightening so as not to apply a rotating force to the end.

Thermo-con/Rack Mount Type

WO Edition D Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N

Vacuum Gripper

TQ1230001-OM103-A ModelZPG16J-7A-X2 ModelZPG(B25,B30)J-7A-X2 (Suction cup formMultistage bellows type 2.5-Stage) (Suction cup formMultistage bellows type 3.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -26No.

Vacuum Gripper

TQ1230001-OM102-B ModelZPG(B25,B30)J-7A-X2 ModelZPG16J-7A-X2 (Suction cup formMultistage bellows type 3.5-Stage) (Suction cup formMultistage bellows type 2.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -23No.

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~ \'\1 ~/I I~ j 'l OI :A(PT)Y. T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1.. I ~J' 20 24.5 zs -~ -eli Bracket View A Panel Mount Type Side dimensions for 418 panel mount type 0 40 21.2 , 6 8.5 36.0-5 >, D 0 . 1,16o;~1 ~ \ z 5-22-0 1 ZS-22-02 Thickness of the panel is 1 to 3.2mm.

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

Stainless Steel Heat

Air cooling after cooler Auto drain Operation Principles Air inlet Heat exchanger Air outlet Drain separator Drain outlet Capacity regulating valve Condenser Capillary tube Pressure switch Fan motor Evaporation thermometer Compressor 2 Stainless Steel Heat Exchanger Type Air Dryer Series IDUS IDUS3E, 4E, 6E Evaporation thermometer G H Illumination switch J K Draft air outlet A B D E Power

Compact Vacuum Unit

(n1) x 0.402 Ejector/Manifold ZZB-SM5 ZB0030-K1L(O)Vacuum pump system/Manifold ZZB-SM5 ZB31-Q1L(O)E F E F 1 Stations n D side U side 1 Stations n D side U side Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch PV PD PV PD Port open to atmosphere PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Supply valve Supply

End Lock Cylinder Series CBG1

Number of auto switches mounted Rod boot material Symbol Models 2 pcs. 1 pc. 70C00 Nylon tarpaulin J D-C7, C8 D-B5, B6 D-H7 D-G5, K5 110C Heat resistant tarpaulin K 15mm 10mm The maximum ambient temperature for the rod boot itself. 20mm 15mm D-B59W 20mm 10mm D-H7LF 3 Series CBG1 Rubber Bumper Type: CBG1BN With rear lock: CBG1BN Bore size Stroke H MM H GA GB Width across flats B1 2-Rc

JCRB-OM00003

I 2 2 t E EKinetic energy (J) I Moment of inertia (kg / m2) :Rotating angle (rad) 180o = 3.14 rad During uniform acceleration, angular speed after t seconds and displacement angle can be found as shown below. x t (1) t d t 1 / 2 t + C (2) C is integration constant. When t = 0, rotation angle = 0, so the integration constant is C = 0.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

IDX-OM-W019

Thread symbol SYMBOL DRAIN TUBE SIZE NONE 10mm UNIT : inch (mm) N 3/8 DRAFT AIR OUTLET B Q E D A SWITH WITH LAMP AIR OUTLET EVAPORATION THERMOMETER AIR INLET F G DRAIN SEPARATOR VENTILATION C VENTILATION VENTILATION TERMINAL BLOCK DRAIN TUBE (O.D.10 LENGTH:0.8m) (820) J K L P N M H 4-13 POWER CABLE WITH PLUG (L=2800) Dimensions (inch [mm]) Model Thread Size A B C D E F G H J K L M N P Q IDFB3E

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Air cooling after cooler Auto drain Operation Principles Air inlet Heat exchanger Air outlet Drain separator Drain outlet Capacity regulating valve Condenser Capillary tube Pressure switch Fan motor Evaporation thermometer Compressor 2 Stainless Steel Heat Exchanger Type Air Dryer Series IDUS IDUS3E, 4E, 6E Evaporation thermometer G H Illumination switch J K Draft air outlet A B D E Power

Steam Valve

74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74

IDUS/IDFS

Series IDFS IDFS6E/8E/11E Evaporation thermometer G H Illumination switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M A B Model IDFS6E IDFS8E Port size J C D M F

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.