HAA

(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

AS-FPQ/AS-FPG

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

VFRA3000

Refer to page 5-11-4.) 2 position double 3 position exhaust center Not required Lubrication (2) Mounting orientation Free 300/50 Impact/Vibration resistance (m/s2) (3) Note 1) In case of single type, be certain that supply pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port 1(P) for activation.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

Maximum load impedance: Power supply voltage 12V: 300 Power supply voltage 24V: 600 Minimum load impedance: 50 Reduce/Increase supply pressure to within the regulating pressure range. Applied pressure error Brown DC(+) Supply pressure is below the minimum regulating pressure.

Exhaust Cleaner for Clean Rooms AMP Series

55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Clean Rodless Cylinder Series CYP

100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Normally Closed SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000 Low power consumption: 0.65W (with light) (Current value: 27mA, 24VDC) Compact with high flow rate Cv factor 1.7 to 3 times greater with same body width as previous series High reliability Long life exceeding 50 million cycles Main valve and pilot valve common exhaust construction eliminates pilot valve exhaust mist and noise Type

PSxx-OMF0005CN

ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(

EX510-GDN1.eng

mA 1 3 Rated current Claw 1 Input/ output point Input point: Max. 64/ Output point: Max. 64 (Changeable by switch settings) Operation temp. range -10 to 50 oC Higher-level bus Protocol DeviceNet Release 2.0 Group2 Only Server Slave type 2 4 MAC ID setting 0 to 63 Vender code: 7 (SMC Corp.)

EXxx-OMV0017-D

(Refer to the I/O Mapping Order of Wireless Base / Remote Module of the Operation Manual (page 50) for details) Mode 1: Assigned to the right from the end plate. Mode 2: Assigned to the left from the wireless unit. Unit address order Mode 1 Mode 2 Mode 1 Base unit setting buttons No. Name Functions 1 Save all Changed settings are stored in the equipment.

50 mA or lessIP40 (Manifold assembly)CE marking, UL (CSA), RoHS recognition0.6 lbs (300 g)

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)9.4 A15 A385/440 W 50/60 Hz420 W0.01 ?

C; rubber seal -5 to 50 C, Optional IP65 enclosure, SUBPLATE, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 22, VQ4000 NO SIZE RATING, .88000 lb

C; rubber seal -5 to 50 C, Optional IP65 enclosure, SUBPLATE (VQ4000), VALVE, VQ4000 VALVE, SOL 4/5-PORT, 22, VQ4000 NO SIZE RATING, .88000 lb

50

50

C; rubber seal -5 to 50 C, Optional IP65 enclosure, SUBPLATE, 1/4 NPT, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 22, VQ4000 NO SIZE RATING, .99000 lb

50 mA or lessIP40 (Manifold assembly)CE marking, UL (CSA), RoHS recognition0.6 lbs (300 g)

C; rubber seal -5 to 50 C, Optional IP65 enclosure, SUBPLATE, 1/4 NPTF, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 22, VQ4000 NO SIZE RATING, .99000 lb