3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VQ

Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >

VCC

(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

90

Release valve 9 stations Release valve 23 Supply valve 6 5 Supply valve 11 10 stations Release valve 10 stations 24 Release valve 4 3 12 Supply valve Supply valve 25 11 stations Release valve 11 stations Release valve 2 1 13 Supply valve Supply valve 12 stations Release valve 12 stations Release valve COM. 25 Triangle mark indicator position COM. 26 Positive common specification Positive

Vacuum Manifold for fieldbus system

Supply valve chatters Deformation of the check valve Refer to (11) -34No. ZKJ-OM00201-D Countermeasure No.

IDX-OM-U010

Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .

Hygienic Design Cylinder/Basic Type

0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)

One-touch Fittings Series KQ2

D1 D2 L1 L2 M A 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 1 8 15.5 33 33.5 26 34.5 35.5 36.5 37.5 40.5 41.5 43 21.5 22.5 14.5 23.5 23 24.5 23.5 5 32 16 18 10.4 3 16 3.5 16.5 19.5 10 11.4 1 4 4.6 17 20.5

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

HRX-OM-W004

SW screen TYPE Contact input signal 2 operation D.IN2 No.11 Setting input operation of contact input signal 2.

05-hyq-e

0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)

Compact Guide Cylinder

Refer to pages 10 and 11 for cylinders with auto switches.

Manifold Specifications

310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5 439 17 20 485.5 475 458 14 3-3-84

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

•

;p R .S, .0 Applicable tube (mm) OIl 6 24.3 16.8 12.8 ' >'8 If ~ . 2 lt8:7 .15.2 Applic;;bfQ tubli q.D 11? Q. R' ' ~ .4 4 23.3 1 5.8 10.4 .