0.4

Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control

VZ1000

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

PSxx-PSV0007

P.1 Pressure measurement value (PD) Pressure value [MPa] Figure 1: Relationship between the pressure measurement value (PD) and pressure value (e.g. : ISE20B unit MPa) Conversion formula from process data to pressure measurement value Pr = a(PD) + b Conversion formula from pressure measurement value to process data (PD) = (Pr b) / a PrPressure measurement value and pressure setting value

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Description Material Note Body A PBT Body B Brass Electroless nickel plated Needle Brass Electroless nickel plated Seat ring Brass Electroless nickel plated Spring Steel wire U seal HNBR Cassette POM, Stainless steel Note) No.

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Cable Motor In-line motor type/D type Cable Table D Motor r Lead [mm] t Stroke [mm] LES8 8 4 LES16 10 5 LES25 16 8 Stroke Symbol J K 30 125 150 100 50 75 Model LES8 LES16 LES25 R/L type with lock is not available. u Body option y Motor option Nil S Without option Dustproof specification Nil B Without option With lock For R/L type (IP5X equivalent), a scraper is mounted on the rod cover

Compact Guide Cylinder

40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31 280 308 62 100 15.5 22 111.5 240 Caution Do not use this cylinder as a stopper.

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

If the pressure remains when manual release is performed, damage to the workpiece may occur due to sudden action. 11. In order to unlock the end lock,push the lock piston with a screwdriver to move the slide table. Fig. 9 -12- 2-5. Piping Ports on the head cover for piping connection can be selected as preferred.

Quick Exhaust Valve Series AQ 1

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2 3 Quick Exhaust Valve with One-touch Fittings Series AQ240F/340F Space-saving Rectilinear IN-OUT tubing connections With One-touch fittings and silencer With silencer Lightweight (Resin body) Specifications Fluid Air With silencer With exhaust port fitting Proof pressure 1.5 MPa Max. operating

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

IIIIIIIIII

OPERATING PRESSURE: 100 PSI .007 B-062-007 B-125-007 .008 B-062-008 B-125-008 .009 B-062-009 B-125-009 .010 B-062-010 B-125-010 .012 B-062-012 B-125-012 .014 B-062-014 B-125-014 .016 B-062-016 B-125-016 .017 B-062-017 B-125-017 .019 B-062-019 B-125-019 .020 B-062-020 B-125-020 .025 B-062-025 B-125-025 .030 B-062-030 B-125-030 .035 B-062-035 B-125-035 .040 B-062-040 B-125-040 Back to Top .

Air Catch Sensor

Non contact style sensor for applications requiring confirmation of work present for machining operations. 3.8-1 Air Catch Sensor ISA How to Order Individual/Centralized Wiring ISA 01 PSE Option ZSE4 ISE4 Applicable to DIN rail Output specifications With bracket B ZSE5 ISE5 NPN open collector 1 output PNP open collector 1 output 11 With gauge G 15 Order DIN rail separately.

Solid State Vacuum Regulator

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

High Pressure Coolant Valve

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid

Clean Room Rodless Cylinder Series CYP ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.