Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l

S Couplers Series KK/KKH/KK13

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. *4. When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction selection is 0(+: Counter motors side).

VQ20/30

PB Construction Component Parts q e Description Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Material No. q w e r t y u r Resin Stainless steel Stainless steel Stainless steel NBR HNBR, Resin w t y u 17-2-83 Series VQ20/30 Dimensions: Series VQ20 In-line Type: Grommet (G) VQ21A1-GBracket mounting holes Mounting holes 2-3.2 through 2-3.2 through Light

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Exhaust Cleaner Series AMC

D E R E X H A U S T C L E A N E R S E R I E S (N)AMC 0 (N)AMC Japanese N North American O P T I O N B Bracket D Threaded Drain Port (Female) B O D Y S I Z E P O R T S I Z E 2 1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT FOR FURTHER TECHNICAL

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

CUJ

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

center B A B A P R R P R 3 Position exhaust center 3 Position exhaust center B A B A Solenoid Specifications P R R Grommet(G)/(H), L type plug connector(L), M type plug connector(M) P R Electrical entry 3 Position pressure center 3 Position pressure center DC AC50/60Hz 24,12,6,5,3 100, 110 , 200, 220 10% rated voltage 0.5(With light:0.55) 0.9(With light:1.0) 1.0(With light:1.1) [1.1(With

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

SJ3A6

y U side e SUP block disk assembly (Release pressure side) EXH block disk assembly (Vacuum pressure side) w e q r D side Component Parts / Plug-in Note Part no.

KR

Hexagon Socket Head Male Connector: KGS H (width across flats) Connection thread R Model L A M Effective area (mm2) Nylon Urethane Applicable tubing O.D.

ML1

r t y u i o !

Clean Gas Filter

Construction q t e r w IN Description No.

NCY2 series

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.