Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/8, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Type: -, Type: Line filter, Hydraulic fluid: Water/glycol series, emulsion series, Connection Port Size: 1 1/4B, Nominal filtration(μm): 10, Differential pressure display: Differential pressure indicator, Relief valve: With Relief valve, O-ring nominal size: N/A, Structure / connection method: Screw-in, Operating pressure (max.)

Type: -, Type: Line filter, Hydraulic fluid: Water/glycol series, emulsion series, Connection Port Size: 1 1/4B, Nominal filtration(μm): 10, Differential pressure display: Differential pressure indicator, Relief valve: With Relief valve, O-ring nominal size: N/A, Structure / connection method: Flange, Operating pressure (max.)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Max Operating Pressure: 3.5 MPa, Construction: Element Upward Removal, Threaded, Port Size: 10 [1 1/4 Threaded, 32 (1 1/4) Flange SSA], Pressure Indicator: Differential Pressure Indicator, Relief Valve: Relief Valve, Fluid: Water-glycol, Emulsion, Element: Micromesh, Filtration: 149μm, Fluid Direction: IN Left, Made to Order: Non-standard Filtration

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0

A

3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41 Y54-04

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

Flow Control Equipment

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

VQ5000

16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.

reduces flow setting time

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Metric size Inch size Elbow Universal 2 3 1/8" 01 23 AS 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" AS-FE KE 6 3/16" Control U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5