Large Size Vacuum Module: Series ZR -A(a set of six threads) Components Valve unit 3 ZR1-SR2-41-1A(a set of two threads) ZH ZR1-SR2-5-A(a set of six threads) 7 ZR1-SR2-8-A(a set of six threads) ZU ZR1-SR2-49-A(a set of four threads) 11 Standard (Without options) [For ZSE30A spec.]
42 41 23 31 31 31 31 41 36 19 19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.
+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333 366 377 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161
+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) IN port direction Model Dimension 9 348 359 384 395 404 415 448 459 7 278 289 314 325 322 333 366 377 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 3 138 149 174 185 158 169 202 213 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295
N.O. 72 80 95 100 88 97 108.5 113.5 41 41 44 44 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 DIN connector: D FN.C.E Normally closed EN.O.F Normally open VX VNl VQ Model N N.C. N.O. K P N.O.
Load Center Offset in Operating Direction (Lo) 25 144 9 + Lo 32 275 11 + Lo 40 520 13 + Lo Bore size (mm) RB Allowable load weight WA (kg) J DBore size (mm) Allowable load weight WA (kg) 5.6 Lo + 2.8 13.34 Lo + 2.9 10 -X 15 Lo: Distance from center of slide block to loads center of gravity (cm) 2043.2 Lo + 6 20 46.15 Lo + 3.55 Data 25 80 Lo + 4 32 188.1 Lo + 5.7 40 10-2-41 41 Series REAL
[mm] Bore size A B E J K M N O T Z 40 152.5 52.5 52 5 41 40 5.5 9 depth 7 44 15 50 154 54 64 7 50 50 6.6 11 depth 8 56 19 D* Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified.
Performance Sonic conductance C [dm3/(sbar)] Recommended flow m3/min(ANR) Weight g Effective area mm2 Model AN10-C06 AN10-C07 AN15-C08 AN20-C10 AN20-C11 AN30-C12 1 7 1.4 0.8 or less 1 20 4 3.0 or less 1.4 30 6 5.0 or less 3.5 25 5 3.0 or less 3.5 41 8.2 5.0 or less 5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.
A0.2 Bore size [mm] A [mm] B [mm] C [mm] D [mm] Hexagon socket head cap screw MGPM MGPL/A 12* 50 18 41 10 8 M4 x 0.7 16 56 22 46 12 10 M5 x 0.8 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M6 x 1.0 32 98 34 78 22 18 M8 x 1.25 40 106 40 86 22 18 M8 x 1.25 50 130 46 110 27 22 M10 x 1.5 63 142 58 124 27 22 M10 x 1.5 80 180 54 156 33 28 M12 x 1.75 100 210 62 188 39 33 M14 x 2.0 4.
18.5 8 15.2 21.8 19 R 1/4 23 9.5 55.3 1.5 49.3 AS321F-N02-07ST AS321F-02-10ST 1/4" 13.2 27.8 39.3 17 31.8 43.3 21 10 18.5 AS321F-N02-09ST AS321F-02-12ST NPT 1/4 19 23 9.5 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 32.8 44.3 22 12 20.9 AS321F-N02-11ST AS321F-03-06ST 3/8" 17.9 31.8 43.3 21 27.8 39.3 17 6 12.8 AS321F-N03-07ST AS321F-03-08ST 1/4" 13.2 27.8 39.3 17 29.5 41 18.5 8 15.2 20.9 19
36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27 1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41
40 For IZS40 For IZS41, IZS42 Symbol Cable full length 40 For IZS40 41 For IZS41, IZS42 01 02 Full length 1m Full length 2m 19 20 Total length 19m Total length 20m Model with Made-to-order power supply cable Available in 1 m increments from 1 m to 20 m.
) AS32m1F-03-12PA 12 18.5 29.7 40.9 (41.3) 26.8 17 41 (42) AS42m1F-04-10PA 10 1/2 27 (28.6) 15.9 18.8 27.4 41.8 (42.6) 36.2 50.8 49.2 40.4 38.8 15.6 66 (72) AS42m1F-04-12PA 12 18.5 30.8 45.2 (46) 35.1 17 68 (74) 10.4 21.8 33 (33.4) 28.7 42.3 40.7 34.7 (34.2) 33.1 (32.6) 3/8 21 (21.7) 16.6 Note) The values in ( ) are for NPT thread.
178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40 50 63 80 100 79 85 87 93 121 121 151 152 12 12.5 11 10.5 15 15 17 20 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 13 17 17 19 27 27 32 41
41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.
G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.
Speed 600 mm/s REAR20 3 1 9 9.5 5.2 22.8 9 6 39 37.5 39 36 38 36 7.5 21 M6 x 1 x 8 REAR25 3 1 8.5 9.5 5.2 27.8 8.5 6 44 42.5 44 41 43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 Direct Mount Type REBR REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 LD MM N P PW Q WS Z QW T W X Y K L M Model REAR10 3.5 M3 x 0.5 4.5
Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .
D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+