Table of Contents

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

2/3 Port Valve for Various

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

CRJ

Find the inertial moment IB for the rotation of shaft (B). 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

Digital Gap Checker ( compatible)

(B) Within the acceptable range (Seats correctly).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

VZ100/300/500

M5 x 0.8 b Cv b Cv VV3Z1-01-1 VV4Z1-20-1 1/8 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no.

VQZ Series

Besides, theres no problem, even though 2(B) port can be either plugged or unplugged.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Find the inertial moment IB for the rotation of shaft (B). 2.

MRHQ

Gripper unit q Two types for 90and 180 Rotary unit w E R P P I Aluminum alloy Body C Gray-White R e N G A P Two types for 90and 180 Stopper lever Carbon steel r A SMC R J N I Stopper guide Stainless steel t A I E Y D R Retainer Carbon steel A y A M T O R Switch guide Resin u Switch holder A Resin i Switch case Resin o Switch holder B Resin !0 Bearing High carbon bearing steel !

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

Micro Mist Separator Series AFD20/30/40

Metal bowl PPA Applicable model Metal bowl with level gauge Metal bowl AL Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22

Mist Separator Series AFM20/30/40

Applicable model Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 10 One-touch fitting O S 1/4 Width across flats 17 (mm) With bracket Accessory specifications Port size Standard specifications With auto-drain Model L 40 53 70 70 M 2.3 2.3 2.3 2.3 B 115 170 204 208 K 8.4 8 10.5

Thermo-con

Communication A B RS-485 RS-232C Select B when communication is not used. Specifications (For details, please consult our Product Specifications information.)

Soft Start-up Valve AV2000/3000/4000/5000

B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

PFxx-OMY0005

(Page 77) 8000 0x1F40 0 R 8010 0x1F4A 0 R Flow rate PD conversion equation: b F32 N 8020 0x1F54 0 R Flow peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N 8060 0x1F7C 0 R Accumulated PD conversion equation: a F32 N Measurement related 8070 0x1F86 0 R Accumulated PD conversion equation: b F32 N Refer to "Inclination and intercept to the unit specification".