SI unit ( device)

cycle time EX260-SIL1 (in/out 2/4 bytes, COM3) 1 ms EX260-SIL1 (in/out 2/4 bytes, COM2) 5 ms 0 byte input/4 bytes output 2 bytes input/4 bytes output (2 bytes input: Device State) (selectable) Process data length Number of outputs 32 outputs Vendor ID 83 hex EX260-SIL1 (in/out 0/4 bytes, COM3) 158 hex EX260-SIL1 (in/out 0/4 bytes, COM2) 159 hex Device ID EX260-SIL1 (in/out 2/4 bytes, COM3) 15A

A_HEC-OM-I009

SUS303, SUS304, EPDM, Ceramic, PPS glass 30%, Carbon Polyethylene, Polyurethane Piping port size Circulating fluid IN/OUT : Rc1/4 Circulating fluid drain : Rc1/4 Circulating fluid IN/OUT : Rc3/8 Circulating fluid drain : Rc1/4 Power supply voltage Single phase AC100-240V, 50/60Hz Current consumption 8A(100V) to 3A(240V) 10A(100V) to 4A(240V) Inrush current 50A or less Over current protection 15A

HEC_001W-E

During Alarm) 9 Unused 1,2 Unused External temperature sensor connector 3 Resistance Bulb Terminal A 4 Resistance Bulb Terminal B D-Sub 15pin (Socket) Fixed screw : M2.6 5 Resistance Bulb Terminal B 6-14 Unused 15 FG 9-2 Appendix 9.2 Power Supply Cable Table 9-3 Power Supply Cable Description Specifications Connector IEC60320 C13 Rating Voltage: 250V (VDE) (UL) Rating Current: 10A (VDE) 15A

smcmaintenancepartslist

Content and quantity Clamp arm Cotter pin Applicable hole diameter For 13 hole For 15 hole For 16 hole For 18 hole For 20 hole For 25 hole For 30 hole CKQG-13A CKQG-15A CKQG-16A CKQG-18A CKQG-20A CKQG-25A CKQG-30A 1 1 1 1 1 1 1 1 1 1 1 1 1 1 For 20 hole (Round/With Shim) 183 Pin Clamp Cylinder/Compact Cylinder Type Series CKQG32 Construction CKQG32-100RH-X2082 e Tube gasket w Rod seal q Piston

High Purity Fluoropolymer

flange No. 1 1 2 2 3 3 3 4 4 5 5 6 6 Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VPA4

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VFR

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C

VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VQ7 Solenoid valve System Silencer Speed controller SGP (Steel pipe) Port size x Length EVS AS420-03 (S = 73 mm2) AN300-03 (S = 60 mm2) 10A x 1 Series VFS4000 Rc A 3 8 VFN AS420-04 (S = 97 mm2) 15A x 1 AN400-04 (S = 90 mm2) Series VFS4000 Rc B 1 2 Double Check Spacer/Specifications Can hold an intermediate cylinder

Size/Valve Type: B (15A, N.O.), Body/Port/Orifice: F (C37; Port 1/2; Orifice 15), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2A (w/Light, 24VDC, DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread), Bracket: XB (w/Bracket)

VXZ

Size/Valve type Body material/Port size/Orifice diameter Voltage/Electrical entry Body material Body size Valve type Orifice diameter Voltage Electrical entry Port size Symbol Symbol Symbol 3 A A B C D E N.C. 1/4 Grommet 10A Aluminum N.O. 3/8 A 24 VDC 10 10 One-touch fitting Resin 3/8" One-touch fitting 12 One-touch fitting B Grommet 100 VAC F C37 4 15A N.C.

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FPM seal), Thread: N (NPT), Port Size: 15A (1/2), Voltage: 1 (100VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor)

Size/Valve Type: B (15A, N.O.), Body/Port/Orifice: F (C37; Port 1/2; Orifice 15), Voltage/Electrical Entry: C (110VAC, Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: G (Low Concentration Ozone Resistant, FKM Seal, NPT Thread)

2/3 Port Valve for Various

VXA213 VXA223 VXA224 VXA225 VXA226 VXA223 VXA224 VXA225 VXA226 VXA226 0.5 1.0 1.0 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A

Size/Valve Type: 4 (Size: 10A, 15A; Valve Type: N.C.), Body/Port/Orifice: J (Body Material: Stainless Steel; Port Size: 3/8, Orifice Dia.: 15), Voltage/Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: A (G Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 4 (Size: 10A, 15A; Valve Type: N.C.), Body/Port/Orifice: H (Body Material: C37; Port Size: 1/2, Orifice Dia.: 15), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2N (200VAC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: Rc, w/One-touch Fitting, Bracket: XB (w/Bracket)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc Series VFR4000 Rc AS4000-03 (S = 21mm2) AS420-03 (S = 73mm2) AN300-03 (S = 60mm2) AN300-03 (S = 60mm2) A 3 8 B 10A x 1 m 3 8 Series VFR4000 Rc AN400-04 (S = 90mm2) AS420-04 (S = 97mm2) 1 2 C 15A x 1 m How to

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: Standard (Bronze Body), Pilot System Option: V (Vacuum Pilot Type), Thread: Rc(PT), Port Size: 15A (1/2), Bracket: B (Bracket)