CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 Air flow (l/min (ANR)) 38 Controlled flow CX 0.2 0.1 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

E-P HYREG ® Series VY1 1

20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2

Compact Type

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

LEC-T1_C

(3-3) LECPLECA .59 (3-3-1) LECPLECA . 61 (3-3-2) LECPLECA . 62 (3-3-3) LECPLECA . 64 2 - (4) .68 (4-1) .68 (4-2) .68 (4-3) .69 (4-3-1) . 69 (5) .70 (5-1) .70 (5-2) .70 (5-3) .70 (5-3-1) . 70 (5-3-2) . 72 (5-3-3) . 73 (5-3-4) . 76 (6) .79 (6-1) .79 (6-2) .79 (6-3) .79 (6-3-1) . 79 (6-3-2) . 80 (6-3-3) . 82 (6-3-4) . 83 (6-3-5) . 83 (7) .84 (7-1) .84 (7-2) .84 (7-3) .85 (7-3-1) . 85 (7-3-

IDX-OM-W026

-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 .

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

T

Color Color Page Page M Metric size (mm) Inch size (inch) Metric size (mm) Inch size (inch) 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 " (3.2) " (3.2) 6 10 12 16 6 10 12 16 General tubing 1.5 MPa max. at 20C Use in spatter generating atmosphere flame resistant material H Black Black 15-6-10 Nylon Tubing Series T White

RSQ

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !

0.5

L IZF10R-CP 3000+60 0 IZF10R-CPZ 9850+100 0 AC adapter IZF10-CG1 With AC cord +105 100 2144 96 1820 50 44 44 7 1 3 1 AC cord +5 0 300 AC adapter e-con connector F.G. cable (AWG26, Terminal semi-stripped) IZF10-CG2 Without AC cord +105 100 28 2144 96 7 1 3 1 +5 0 300 Inlet IEC60320-C8 e-con connector AC adapter F.G. cable (AWG26, Terminal semi-stripped) IZF10R-CG1 3 2 7 1 300+5 0 F.G. cable