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LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

(Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range "HHH" is 6 12 to 30 VDC. displayed. (1) Reset applied pressure to (1) Check if the pressure exceeds the a level within the set pressure range.

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

M D2 L A D1 NPT, R(PT) Nylon Urethane M5 0.8 M6 1.0 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 36.5 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 1 8 M5 0.8 M6 1.0 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6

Problem Problem possible causes Investigation method Countermeasures Check that the power supply voltage is within the range 12 to 24 VDC 10%. Supply the correct voltage of 12 to 24 VDC 10%. Incorrect power supply Check the wiring to the power supply.

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 12 - LECSS LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

No.0 No.1 No.2 // SpeedSET MENU2 ESC TB Ver1.** / ///TB TB Ver2.** / ///TB 12 6.23 22 - (2) / TB Ver TB Ver.5.11 12 5.21 6.1 TB Ver2.1*LECPA 12 (2-1) LECPLECA INP ON ON INP OFF (2-1-a) TB Ver1.** TB Ver.5.11 Step data AX IS. Menu 1 Step data Parameter Test SET No. Step No.2 SET AX IS.

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX

EX600-ZT1 (6) Assembled type connector PCA-1446553: For EtherNet/IPTM communication, M12 (4 pin) Plug, D code PCA-1578078: For power supply, 7/8 inch, Plug, Cable O.D. 12 to 14 mm PCA-1578081: For power supply, 7/8 inch, Socket, Cable O.D. 12 to 14 mm (7) Power supply cable PCA-1558810: Cable with 7/8 inch connector, Socket, Straight 2 m PCA-1558823: Cable with 7/8 inch connector, Socket,

Heavy-duty cord 3-wire (PNP) MDSUA1 12 V Relay, MDSUA3 5 V, 12 V 5 V, 12 V, 24 V Parallel cord 24 V Grommet IC circuit PLC 2-wire 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord Heavy-duty cord 100 V 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2

shift input 12 to 24 VDC (Gray) (Gray) + Main circuit OUT1 OUT1 12 to 24 VDC Load (Black) (Black) OUT2 OUT2 Load (White) (White) Load DC () DC () (Blue) (Blue) Descriptions Output (OUT2) display (Red) LCD Lights up when OUT2 is ON.

55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

12 V 2-wire REC Reed switch Solid state switch Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire IC circuit Diagnostic indication (2-color indication) Relay, PLC CY 24V Yes CX Grommet IC circuit Water resistant (2-color indication) IC circuit MQ With diagnostic output (2-color indication) 5 V, 12 V Magnetic field resistant

5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT 29 37 46 57 56 71 89 109 5.5 6.6 9 11 23 27 31 37 12 16 18 21 144 164 177 209.5 MLUL25 MLUL32 MLUL40 MLUL50 LS + Stroke X Y X Y LX LZ 4-LD ZZ + Stroke Front flange type 2-FD FY FV (mm) FV FT FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FD Model 8 8 9 12 24 28 32 39 5.5 7 9 11

VFS210 AR425 Nylon 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 Nylon 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 Nylon 12/9 AN400-04 AS420-04 Please install the silencer responding to it necessary. 13 3.

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Wiring 41 7.4. Process data 41 7.5. LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1.

Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6, Er7, Er8, Er9) System error (Er0, Er4, Er6, Er7, Er8 or Er9) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. (2) Supply a correct voltage of 12 to 24 VDC 10%.