Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 42R (Base Mounted), Stations: 13 Stations, A Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: Solenoid on Same Side as A Port, Piping: Base Mounted, Stations: 13 Stations, A Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 13 Stations, A Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

IDX-OM-W025

Specification for Option T 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Remote operation . 13 1 13 4 How to connect the power supply and signal cable . 13 2 13 5 How to re-start the operation . 13 2 13 6 Electric circuit . 13 3 Chapter 14 Service Record 14 1 Service Record . 14 1 Table of Contents 2 IDX-OM-W025 Air Dryer i Safety Instructions Safety Instructions i Before

Pin Clamp Cylinders

-X 545 C(L)KU32 Series Auto Switch Mounting 2 Auto Switch Mounting Height Applicable cylinder: C(L)KU32-X2321 C(L)KU32-X2322 D-P3DWA 44.5 23.5 D-M9V D-M9WV 40 35 D-A7 40 22 546 Auto Switch Mounting C(L)KU32 Series Auto Switch Mounting Bracket Part No.

JXCx-OMT0028CN

CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30 . 30 7.CN1(CONT) . 31 7.1 . 31 7.2 . 33 8.CNTB/PC . 34 8.1 . 34 9.LED . 35 9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40 11.1 . 40 11.2 (IN Data) . 46 11.3 (IN Data). 46 11.4 (OUT Data) . 48 12.LEC . 49 12.1GW LEC . 49 12.2GW LEC . 50 13./ . 51 14./ . 52 14.1

VK300

(-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

MHS

C C 2 5 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 21 1.

Fieldbus System

352 368 384 400 416 432 L3 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5 410.5 423 435.5 448 473 485.5 498 L4 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 337.5 350 362.5 375 400 412.5 425 437.5 462.5 475 487.5 L5 13.5 12 16.5 14.5 13 17.5 15.5 14 12 16.5 15 13 17.5 16 14 12.5 17 15 13.5 11.5 16 14.5 12.5 16 Plug-in Connector Connecting Base

IDX-OM-W022

Specification for Option T 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Remote operation . 13 2 13 4 How to connect the power and signal cable . 13 2 13 5 How to re-start the operation . 13 3 13 6 Electric circuit . 13 4 Chapter 14 Specification for Option V 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 How to perform maintenance . 14 2 14 4 Electric

CEx-OMI0064

8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

3 Port Solenoid Valve Rubber Seal Series SY100 1

13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

VZ1000

Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

3 Port Solenoid Valve Rubber Seal Series SY100

(Values at the initial period) Solenoid Specifications Base mounted 13 24 SY1 A 13 24 Series SY1 Grommet (G)/(H), L plug connector (L) M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60 Hz 100, 110, 200, 220 JIS Symbol SY113 4 (A) SY123 4 (A) 10 to +10% Allowable voltage fluctuation Power consumption (W) DC 0.75 W (With indicator light: 0.8 W) (A) 2

K35-OMW0030

Power supply 4 JOG24V 13 CAL 14 E-STOP *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Electro-Pneumatic Positioner

Series IP8000/8100 (Lever type) (Rotary type) compared with IP6100) compared with IP6100) 100mm in height (shortened by 13% y 13% compared with IP6100) compared with IP6100) 100mm in height (shortened by 13% compared with IP6100) (shortened by 13% y 13% Folk lever joints (Rotary type) Can absorb off-centering. 100mm 100mm Spring pin Pressure gauge (O.