MHZ2/MHZJ2

Max. screw-in depth l mm Maximum torque Nm Model Bolts M3 x 0.5 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 5 8 10 12 0.69 2.1 4.3 7.3 Maximum torque Nm Max. screw-in depth l mm Model Bolts M4 x 0.7 Without clearance M5 x 0.8 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 0.88 2.1 4.3 7.3 6 8 10 12 Impact load M6 x 1 Using the body through hole Hole depth mm Bore mm 11H9 17H9 21H9

One-touch Fittings Series KQ2

D L M Weight (g) A Nylon Urethane M5 0.8 12.7 3.4 2.9 KQ2H23-M5 KQ2H23-01S KQ2H23-02S KQ2H04-M5 KQ2H04-M6 KQ2H04-01S KQ2H04-02S KQ2H06-M5 KQ2H06-M6 KQ2H06-01S KQ2H06-02S KQ2H06-03S KQ2H08-01S KQ2H08-02S KQ2H08-03S KQ2H10-01S KQ2H10-02S KQ2H10-03S KQ2H10-04S KQ2H12-02S KQ2H12-03S KQ2H12-04S KQ2H16-03S KQ2H16-04S 2 9 16 2.4 2.5 9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference

Series KG Stainless Steel One-touch Fittings

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

Hydraulic

+0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 F J E B-series dH10 +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 H -0.1 -0.4 D +0.07 0 25 16 M5 x 0.8 76 60 25 32 M16 x 1.5 26 16 +0.084 0 31.5 20 M5 x 0.8 90 70 30 40 M20

24

and 16, M5 x 0.8 is only available.

7.5

17 14.5 12 16 13.5 17 14.5 12 16 13.5 17 14.5 16 12 14.5 17 13.5 16 12 55 Series SJ2000/3000 Dimensions SS5J3-60U (S, R, RS) Stations (Pitch) P = 10 23.6 12.8 [External pilot spec.] 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 30.6 32.1 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D D One-touch fitting [1(P), 3/5(E) port] M5 x 0.8 [4(A), 2(B) port] Applicable tubing O.D: 8, 5/16" One-touch fitting 20.5 6.2 One-touch

Stability of suction position,

16 16 8.5 8.5 8.5 M8 x 1.25 14.5 M8 x 1.25 14.5 M8 x 1.25 14.5 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 9.5 9.5 5 9.5 23 52.6 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Width across flats 6 Seal washer Width across flats 6 26.5 56.1 Seal washer Width across flats 6 21 50.6 40 31 31 34.5 7 38 10 32.5 5 54 50 37 16 6 44 40 29.4 6

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

•

Bl>llOws type ZPY10g 10 12 12 22 38 49 72 83 3 1,7 Mode~ M4 M5 M6 MB M5 M6 M8 M5 M6 Me /'.14 M5 M6 M8 ZPY13C U 13 1 5 121 ' 22 , ZPY02 1 \,1,11 \ ' 11 11 'E:o:.d' i&M' ZPIlB (lib,.,) II,.r,4,1 ~ 49 72 183 3, 1.8 ZPY16g 16 18 12.5 22.5 38.5 49.5 72.5 83,5 3.5 1.2 Deep type mm ZPY10 y Model F I>A, fe, c D E G c H ZPY13 I 25 25 25 !

Stainless Steel 316 Fittings

Value of nylon tube for 16 only. Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Air Slide Table

x 0.8 M 15 MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1 MXQR-CS16-X11 11 14 5 36 17 M5 x 16 M5 x 16 15 13.5 23 21 13.5 16

30

Value of nylon tube for 16 only. Hexagon Socket Head Male Connector: KQB2S (M5) Applicable tube O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

Table of Contents

VS4 16 stations Max. 16 stations.

Modular F.R.L. Units

*16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5