1

16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58

Basic type / Direct mount type Series CY3B/CY3R

12 V Relay, PLC 24 V Grommet Yes Diagnostic indication (2-color display) IC circuit 5 V,12 V 12 V 3-wire (NPN equiv.)

Modular F.R.L. Units

thread type: M5, NPT.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

ZP

Size 10, 13, 16 Size 40, 50 Flat Flat Deep: ZPY40D only Deep: ZPY10D/16D only Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 M5 x 0.8 (Miniature tube fitting Series M5) Hexagon width across

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Valve Single Unit

x 0.8 12 12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

Vacuum Module Series ZX

Note 2) M5: Suffix -4, M6: Suffix -1 Note 3) M5: Suffix -1, M6: Suffix -2 Adapter D P3200152-12 (M2.5 x 28) Philips screw ZF M2.5 x 12 Philips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) Adapter D (2) Individual spacer R1 ZP M2.5 x 12 Philips screw Adapter D individual spacer R1 assembly Assembly no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

3 Port Air Operated Valve Series SYJA300

(80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting) 2-4.5 Manual override (Non-locking) Manual override (Non-locking) (External pilot port) (For mounting) (For solenoid valve) 12 23.5 11 A (44) (36) 21 28 29 25 27 34 18

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth

Series KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for

Series KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for

KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after

KG

(mm) <M5> Weight (g) Note) D Applicable tubing Applicable tubing KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 15.5 13 16 19 16.5 20 18 17 4 4.1 4 2.5 19 23 20 9.5 9.8 11.5 11.8 13.8 4 2.6 8 3.6 4 M5 x 0.8 4 1 8 3 2.5 M5 x 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

ZX

Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less ) M5 x 0.8 Unit no.

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.