Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Insulation failure (interference with other circuits, poor insulation between terminals, etc.) could introduce excessive voltage or current to the controller or its peripheral devices, causing damage to them. 11. The speed and force may change depending on the cable length, load, and mounting conditions.

AMG

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

PC Wiring System

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

Activated Carbon Filter

Assembly of Optional parts 11 8. Troubleshooting 12 9. How to Replace the Components 13 to 14 9-1. Bowl assembly Replacement 13 9-2. Element Replacement 14 10. Disassembly Drawing 15 11. Dimensions 16 -1- Activated Carbon Filter Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116

HRL

(including 6 M8 bolts)*7 Weight (dry state)*11 kg Approx. 240 Approx. 260 Approx. 330 *1 Use fluid in condition below as the circulating fluid.

Trimmer Auto Switch

Series 10 16 20 25 32 40 50 63 80 100 125 MHZ2 3.0 5.5 6.5 8.0 7.5 MHZJ2 3.0 5.5 6.5 MHS2 (2 fingers) 1 4.0 4.0 6.5 6.5 8.0 6.5 MHS3 (3 fingers) 1 5.0 4.0 6.5 6.5 8.0 6.5 7.5 7.5 7.5 MHS4 (4 fingers) 1 5.0 3.0 6.5 6.5 8.0 6.5 MHC2 2 -10 to -10 to 11 16 Air cylinder Unit: mm Tube I.D.

Pressure Sensor

M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.

0.01

Description Note Material Bracket set 1 SFD-BR100 With 2 countersunk head screws (M3) IDK e AMG AFF SFD200-C Component Parts No. Description Note Material AM Element 1 PC, Polyolefin, PU o !

Trimmer Auto Switch

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) 5. Modification of the detecting position should be made in the condition of 3. Auto switch Auto switch mounting nut Auto Switch Mounting Bracket Part No.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

Exhaust Cleaner Series AMC

1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

IDX-OM-X011

Inspection record .11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-X011 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before using the product, be sure to read and understand all the important actions highlighted in this manual.

IDX-OM-Y002

Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before using the product, be sure to read and understand all the important actions highlighted in this manual.

DOC1013369

Description Material Note 1 Body A PBT 2 Indicator 3 Body B PBT 4 Needle PBT 5 Needle guide BrassNote2) Electroless nickel PlatedNote2) 6 U-seal HNBR 7 Spacer PBTNote1) 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR Note1) AS3002F-11A, AS4002F-11A and AS4002F-13A have electroless nickel plating on the brass parts.