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Default setting is H_2: 5.0 kPa. 17 - NO. ZQ-OM01501 Normal output (OUT1) (1) Press the button once in measurement mode. (Refer to page 17) (2) P_1" and the set value are displayed in turn. (3) Press the or button to change the set value. The button is to increase vacuum pressure and the button is to decrease.

IEC 12-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 12-1 IDFA Series 12 1 IDX-OM-W017 12 T 12-3 ON ON/OFF 3 3 5 () 12-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: M3 6.5mm 2 :1.25mm :17 :17 IDFA Series 12-3 12 2 IDX-OM-W017 12 T 12-5 IDFA4E 8E-23-T IDFA11E-23-T GFGI R GFCI R GFCI R GFGI R 1 2 3 L N PE 1 2 3 L N PE TB TB MC TDR MC TDR ILS ILS V V EVD V V MC TDR EVD MC TDR PTC OLR MC

L IBG1-12-10-50S 50 IBG1-12-10-100S 100 IBG1-12-10-150S 150 IBG1-12-10-300S 300 Width across flats 17 Width across flats 17 Width across flats 19 Width across flats 19 L + 22 Reference dimension after R thread installation L 7 Chip guard (Please order separately.) 11 Polycarbonate (Transparent) 2 [mm] 26 D Part no.

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Refer to Trouble No.17 Copy function error. Not able to copy. Copy error [Er13] is displayed on the copy Refer to Trouble No.18 destination pressure Refer to Trouble No.19 switch. -66No.PS-OMX1005 Troubleshooting list Problem No.

22 Function selection mode 22 Default setting 22 F0 Units selection function 24 F1 Setting of OUT1 25 F2 Setting of OUT2 28 F3 Response time 29 F4 Display resolution 32 F5 Auto-preset function 33 F6 Fine adjustment of display value 35 F7 Power saving mode 36 F8 Security code 37 F9 Setting of low-cut function 38 Special function setting 39 F90 Setting of all functions 39 F97 Copy function 41

RWr(n+20) RWw(n+20) RWr(n+21) RWw(n+21) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+2E) RWw(n+2E) RWr(n+2F) RWw(n+2F) RWr(n+30) RWw(n+30) RWr(n+31) RWw(n+31) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+3E) RWw(n+3E) RWr(n+3F) RWw(n+3F) Unit No.1 EX600-GILB RWr(n+40) RWw(n+40) RWr(n+41) RWw(n+41) IO-Link IO-Link : : Process data Process data Port

Copy function error Incorrect wiring Correct the wiring. 17 (2) Check the power supply wiring. Unable to copy Product failure Replace the product. -72No.PS-OMU0003-D Problem No.

Compatible Driver Pulse input type/ Positioning type Pulse input type CC-Link direct input type SSCNET#type Driver type Series LECSA LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 Pulse input v v Applicable network CC-Link SSCNET# Control encoder Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Communication function USB

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN Refer to page 11-5-30 for details on other applicable switches. 11-5-17 17 Series MSUB Specifications Model 3 MSUB3 MSUB7 MSUB20 MSUB1 Single vane Vane type Double vane Single vane Double vane Single vane Double vane Single vane Double vane Rotating angle 1 90 10 180 10

) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC

[F20] 45 [F22] 46 OFF [F30] 47 OFF[] [F32] 48 OFF[] [F33] 50 FR0 [F34] 51 OFF [F80] 52 [] [F81] 53 OFF [F82] 54 [*] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

Refer to the outline dimension drawing (page 41) for mounting hole dimensions. The self tapping screws should not be re-used. Direct mounting (PF3W511/521) Mount using the self tapping screws (nominal size: 4.0 x 4 pcs.) for installation. The tightening torque must be 1.0 to 1.2 Nm. Refer to the outline dimension drawing (page 41) for mounting hole dimensions.

3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SIDE U SIDE D n 3 STATION 2 1 SMC SMC BB 2 2 2 2 2 2 AA S R Q 4 4 4 4 4 4 U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41

Bore size (mm) NT-02 NT-04 NT-04 NT-05 NT-05 NT-08 NT-10 B C d D H 12.5 21 21 26 26 31 39 5 8 8 11 11 13 16 15 25.4 25.4 31.2 31.2 37 47.3 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 32 40 50 63 80 100 13 22 22 27 27 32 41 256 Auto Switch Mounting CHQB/CHQWB Series Refer to pages 431 to 490 for detailed specifications.

13.6 16.1 17 18.6 20.8 T H M M L Note) Value of FEP tube.

Weight (g) KNK-10-400 KNK-10-600 KNK-12-400 KNK-12-600 KNK-16-400 KNK-16-600 KNK-20-400 KNK-20-600 44 44 44 44 64 64 77 77 17 17 17 17 17 17 17 17 41.7 41.7 41.2 41.2 41.8 41.8 43.8 43.8 17 17 19 19 24 24 27 27 17 17 17 17 17 17 17 17 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 35 D 8.5 H2 H1 L1 M Pivoting nozzle with male thread/KNK (mm) Model Nozzle size D Connection thread L1 A Width across

No.PF-OMP0002-H PRODUCT NAME Digital Flow Switch MODEL / Series / Product Number PFMB7501 PFMB7102 PFMB7202 Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step