AME

Aluminum die-casted Aluminum die-casted Material Note q Description Housing Body Chrome treated Epoxy coating on inner surface Note: Sight glass is indicated in the figure above for easy understanding of parts, however mounting position is different. Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HEC-OM-S019

Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX . T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

This can cause damage to the valve body. 482 Series LVH Manually Operated Integral Fitting Type/Threaded Type Construction Integral fitting type Threaded type u u q q e w e w LVC A B A B r LVA Description Material Parts list No.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

OMS0020

How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.

Moisture Control Tube

Correction Factor C1 for Supply Air Dew Point Kv: Volume ratio Vt : Piping volume (mm3) Vc: Actuator volume (mm3) Kv = q Vt Vc Correction factor C1 2 Supply air dew point (C) 10 Vt : Piping volume (mm3) [can be selected from piping volume chart in Fig. 2.] d : Tube I.D.

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

*The D-A9/M9/P3DWA auto switches are shipped together, (but not assembled).

VDW30/40-XF

/Dimentions Male Quick Fastener Dimensions Table A 60.15 Port size (Quick fastener) Port size (Quick fastener) P7 P10 P7 P10 A B C D E 7 0 0.05 9.90.05 15 10 0 0.05 12.850.05 20 Clip part no. A B C D VDW30-CP7 26 7 9 14 VDW40-CP10 28 10 10 15 C D 2.50.1 9 or less 1.6 or more 2.5+0.25 0 2.5+0.25 0 D B 120.1 13 17 O-ring 2 or more O-ring dimentions P7 P10 (Nominal no.)

        Series VKF300

5<3'95 % A " 8 " $ )% % 8 % =) *% $ ) 2% 8 % " 1 ,% 2 % ) .BB & A & 1% % $) $ ) ) ) ) ) 88 % ,) ; ' ; 8 1 ) /% ) / , A & 1% % '$ , $ 3 :; C $ 1 ,) ; ' ; ) ) ) ) 88 % /% ) / VQD VKF .$ VK VT VS t o r e q y u i w & q w e r t y u & D % % ' % % ' % % ! ! ! , !%,' ? !2! 8 % 8 % ? ( , 0( , = ) % $ B /EB3A /EB '!'

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

MWB

The D-A9l/M9l/P3DWAl auto switches are shipped together, but not assembled.

Smooth Cylinder Series CQSY

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

How to Calculate Flow (At an air temperature 20C) 1P1+0.1013<1.89(P2+0.1013) Q=226S P(P2+0.1013) Piping 2P1+0.10131.89(P2+0.1013) 1Completely flush (air blow) pipes before plumbing to remove dust. 2Clamping torgue: Q=113S(P1+0.1013) Q:Flow rate under standard conditions [ /min (ANR)] P1:Upstream pressure (MPa) P2:Downstream pressure(MPa) P:Pressure differential(P1-P2)(MPa) S:Effective area

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43 23.5 3 5.2 23.5 15 M6 x 1 x 8 12-CY3R25 10.5 111. 33.6 10.5

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

D) Exhaust the air while in the clamped state, and confirm that the clamp arm does not open. 7 Setup Procedure CKZT -X2797 -X2798 Power clamp cylinder mounting and setup procedure Distance to hard stop Cylinder Clamp arm Shim q Upper hard stop Unclamping port Shim w Clamping port Arm side block Hard stop Procedure