MHZ

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

Series KP/KPQ/KPG

25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

-00 KPGU12-00 20.9 20.9 18.1 58 46 32 57.2 32.9 25 Q Note 1) D indicates the maximum diameter.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 When used as an IO-Link device Brown L+ L+ Main circuit Black C/Q C/Q IO-Link master White Other Blue L L 17 2-Color Display Digital Flow Switch PF2M7(-L) Series Construction: Parts in Contact with Fluid PF2M701/702/705/710/725/750/711(-L) e w w q e r t y u i o r Female thread w PF2M705/710/725/750-C4/C6(-L) PF2M711

Speed Controller: Standard Type Series AS In-line Type

0 q y !3 !2 !1 o w !3 e t w o u !4 y q !2 AK ASS ASR ASF Meter-in type M5 type U10/32 port AS3210-02 Component Parts No. Description Material Note No. Description Material Note Body A O-ring Zinc alloy NBR q i Body B O-ring Electroless nickel plated Brass NBR w o Needle Bushing Electroless nickel plated Brass PBT e !0 Seat ring O-ring Electroless nickel plated Brass NBR r !

Sine Rodless Cylinder Series REA/REB

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts Component Parts No. Description No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

20.9 18.1 58 46 32 57.2 32.9 25 KPQU12-00 KPGU12-00 Q Note 1) D indicates the maximum diameter.

3 Position Cylinder Series RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Guide Cylinder Series MGG

Q Copper-Free Type (for CRT production processes) Y + Stroke X In order to eliminate the adverse effects of copper ions and halogen ions on CRT production processes, this type does not use copper or fluorine materials.

Environment

0 i o e r t q u !1 !2 !3 !

Compact Manifold Regulator

1 q SMC o A Component Parts Description Replacement Parts Part no. Material Note Material No. Description No.

Dual Speed Controller with One-touch Fitting Series ASD

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

IDG

o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Aluminium alloy NBR Piston seal Body !0 q MI W S NBR Rod seal Piston assembly !1 w Heat treatment/Special treatment Carbon steel NBR (MIW8 ... M-3P) Gasket Finger !2 e CEP1 Hard anodized Aluminium alloy Cover r Plug !3 (MIW12 to 25 ...

ML2B

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !