Sine Rodless Cylinder Series REA range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500
Description VHS20 to 50-A VHS20 to 50-B part no. Note 1) part no.
Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal
If an instantaneous flow of 10 L/min lasts for 5 minutes, the accumulated flow will be 10 x 5=50 L. Accumulated pulse output A type of output where a pulse is generated every time a predefined accumulated flow passes.It is possible to calculate the total accumulated flow by counting the pulses.
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Note 2) The tightening torque for the hexagon socket head cap screw (M2.5 x 5 L) is 0.25 to 0.35 Nm.
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ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 469 b XLAQ Series Specifications XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 Model Flange (valve) size 16 25 40 50 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (
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Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.
x 0.7 Thread depth 7 CXS10-20-XB19 20 92 75 CXS10-25-XB19 25 97 80 6 CXS10-30-XB19 30 102 85 CXS10-35-XB19 35 107 90 40 CXS10-40-XB19 40 112 95 CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130 5 Series CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter
If an instantaneous flow of 10 L/min continues for 5 minutes, the accumulated flow will be 10 x 5 = 50 L. Accumulated pulse output A type of output where a pulse is generated every time a predefined accumulated flow passes. It is possible to calculate the total accumulated flow by counting the pulses. Outputs a value proportional to the flow rate.
Model XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Flange (valve) size 25 40,CF070 50 63,CF114 80 Actuating type Normally closed(Pressurize to open, spring seal)[both main & initial exhaust valves] Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type: 5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Main pumping
Standard stroke (mm) Bore size 50 63 80 Extended 40.3 78.5 88.2 Retracted 139.5 174.6 217.3 Bore size Standard stroke 50 30 63 30 80 40 1-4. Cylinder mass Action Bore size Mass (mm) (kg) 50 1.70 Double acting Single acting (spring retraction) Double acting with spring 63 2.78 80 4.96 4 - 2.
121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers
ASD230FG ASD330FG ASD430FG 100 200 400 1.5 3 6 07, 08, 09, 10, 11 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm Effective area mm Effective area mm 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle revolutions Number of needle revolutions Number of needle revolutions ASD530FG ASD630FG 1500 1000 14 20 12 Flow rate l/min
for piping IZN10E-11 With Stainless steel 316 One-touch fitting*2 + Anti-static tubing * Discharge time at a distance of 50 mm from the end of tube Tube I.D.: 5 mm Tube I.D.: 4 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 2 2 0.05 MPa 0.1 MPa 1 1 0.1 MPa 0.3 MPa 0 0 0 400 500 200 300 100 0 400 500 200 300 100 Maximum operating pressure is 0.1 MPa.1 Tube length [mm] Maximum
-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .
4 Direct Body Mount 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on series) MHW2 Direct Body Mount 20, 25, 32, 40 & 50 Gripper Bore sizes MY1B/M/C Direct Body Mount 25, 32, 40, 50 & 63 Bore sizes MY1H Direct Body Mount 25, 32 & 40 Bore sizes RSH Direct Body Mount 20, 32, 50, 63 & 80 Stopper Cylinder Bore sizes our new part # CE1 Direct Body Mount BQ-1 (12 & 20 Bore)
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