Information

[C] [60 Hz] Circulating fluid temperature [C] Pump Capacity 012 018 024 A W 012 018 A W HRS -20 (Single-phase 200 to 230 VAC) HRS -10 (Single-phase 100/115 VAC) 0.30 0.30 30 30 Outlet 60 [Hz] Outlet 60 [Hz] 0.25 0.25 Outlet 50 [Hz] Outlet 50 [Hz] 0.20 0.20 20 20 0.15 0.15 0.10 0.10 10 10 0.05 0.05 Return port Return port 0 0.00 0.00 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Pressure [MPa]

VZ3000

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

High performance type Step Motor Controller (Servo/24 VDC)

PWR: Power supply plug 23 5.1 Power supply plug specifications 23 5.2 Electric wire specifications 23 5.3 Wiring of power supply plug 24 (1) Wiring of the power supply (C24V, M24V, 0V) 24 (2) Wiring of the stop switch (EMG) 24 (3) Wiring of the lock release (LK RLS) 24 5.4 Stop circuits 25 (1) Example circuit 1 Single controller with teaching Box 25 (2) Example circuit 2 multiple controllers

Multi-Axis Step Motor Controller

Refer to the dimension drawings on pages 7 and 10 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimension No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423

RLQ

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No. YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

CNS

Graph (1) 30 20 10 2.

AC Servo Motor Driver (SSCNET /H Type)

Refer to LECSS2-T Operation Manual,section 3.5 for input/output signal details. -10- 3.3.2 Source Sink I/O interfaces Connection example An example wiring diagram for Sink I/O is shown below Driver Servo amplifier () CN8 (Note 16) Short-circuit connector (Packed with the servo amplifier) 10 m or less driver) (Note 12) CN3 10 m or less 24 V DC (Note 10) 3 DOCOM (Note 15) Main circuit power

PFxx-OMU0002

Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.

3

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200

XMD/XYD Series

Model XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Flange (valve) size 25 40,CF070 50 63,CF114 80 Actuating type Normally closed(Pressurize to open, spring seal)[both main & initial exhaust valves] Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type: 5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Main pumping

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

PFxx-OMS0001CN

min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1

Refrigerated Air Dryer

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

VCA

D side U side Stations 1 2 3 4 5 n 42 55 12.5 72 2-3/8 IN port (front ported) 38.5 37 25 24.5 25 19.5 P = 28.5 n-1/4 OUT port L dimensions Side ported: L1 = n x 28.5 + 10.5 L2 = n x 28.5 + 20.5 Front ported: L1 = n x 28.5 + 50.5 L2 = n x 28.5 + 60.5 (mm) Model Dimension n (stations) IN port direction 9 267 277 307 317 10 295.5 305.5 335.5 345.5 4 124.5 134.5 164.5 174.5 5 153 163 193 203

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Applicable Auto Switches/Refer to Best Pneumatics No. 3 for further information on auto switches.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating