100 100 200 120 140 140 140 220 193 193 238 289 289 289 357 182 182 215 242 242 242 317 159 159 215 219 219 219 270 480 704 1056 1203 1703 1210 159 159 245 264 264 264 130 130 165 216 216 216 35 35 37 80 150 150 72 190 390 575 893 1038 1538 950 35 35 138 170 276 276 365 203 203 266 324 324 324 473 83 83 212 258 366 366 500 1 2 1 2 1 1 2 2 3 1 1 1 1 1 1 4 267.3 18
100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8
speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 7 Fully opened 0 0 1 2 3 4 5 6 7 8 9 10 Without restrictor Without restrictor Number of restrictors needle rotations Fully opened Number of restrictors needle rotations Restrictor: ASN2-M5 Pressure: 0.5 MPa Mounting orientation: Horizontal, No-load, Piston extended The above piston speed
N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103
Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80
PF2A510 1 10 PF2A550 5 50 PF2A511 10 100 PF2A521 20 200 PF2A551 50 500 -22No.PF-OMO0010-C Dimensions (in mm) PF2A510/550 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3 mm -23No.PF-OMO0010-C PF2A511/521/551 Output specifications A B C Output for PF2A3 48 mm 62 mm 94.3 mm Output for PF2A3 + Analogue output 58 mm 72 mm 104.3
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Valve size Valve type Port size Rated voltage A: Non-locking extended type Orifice size (mm) Symbol Symbol Symbol 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C. N.O. C.O.
400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure
It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.
It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.
V 100 V or less 100 V, 200 V 200 V or less 24 V or less IC circuit Grommet Relay, PLC 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state
V Grommet IC circuit 100 V or less None B54 B64 (B54) (B64) 100 V, 200 V Yes Relay, PLC 12 V 2-wire 24 V 200 V or less None C73C C80C Yes Connector 24 V or less IC circuit None Diagnostic indication (2-color indication) (B59W) B59W Grommet Yes Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example)
kPa200 kPa) (41 ) ON (41 ) ON(OFF) (34 ) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) [ON/OFF] [] [kPa] () -62No.PS-OMR0001CN-J Revision history A B C D E F [2018 3 ] G [2018 6 ] H [2019 9 ] I [2021 10 ] J [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku
kPa200 kPa) (42 ) ON (42 ) ON(OFF) (35 ) ON (NPN/PNP) (100 kPa200 kPa) (28 ) ISA3 2 -65No.PS-OMT0001CN-E 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, OUT2 (OUT2) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) -66No.PS-OMT0001CN-E 5 [ON/OFF] [] () [kPa] -67No.PS-OMT0001CN-E Revision history A [2018 3 ] B [2018 6 ] C [2019 9 ] D [2021 10 ] E [
Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.
How to Order 1F 06 T 200 AS Flow Direction Symbols on Body Indication symbol Symbol Body size Tamper proof Note) Speed controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Made to Order (Refer to page 608 for details.) Applicable tubing O.D.
VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10
XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator
140 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 140 120 160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption
mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement MSQXB10A MSQXB20A 300 400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed