Check Valve Series AK

Note) Use Series AS-F with -X214 for the throttle valve. 2. Cracking pressure is a pressure at which the valve starts opening and not a pressure at which the valve is fully open. 15-8-7

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F + 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R + 17 S/S NG 36 PULSE R 18 4 LA A phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common Plate SD 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector

LA-OMP0023

A B C D E F G H LAT3-10 10 49 4 60 50 4 10.5 LAT3-20 20 69 6 25 90 80 14 20.5 LAT3-30 30 89 6 25 120 110 24 30.5 13 - LAT3-50 Note 1) Refer to Mounting screw specifications and tightening torques in section 4.3 Mounting (P.24). Note 2) The length of the part of the dowel pin inserted into the positioning hole should be shorter than the specified depth.

Air Catch Sensor Series ISA

With n stations, it attaches to the first switch and the nth switch. 3 105 36 4 140 71 5 175 106 6 210 141 2 70 Station L1 L2 PSE IS ISG ZSM Body Manifold With DIN rail L1 Lead wire (5 m) 35 (18) Deviation level indicator light Deviation level indicator light SUP port 25 25 Rc 1/8 90 SUP DIN rail center 4.5 90 35 4.5 35 40 30 (4.5) 35 70 Setting dial Gauge Gauge L2 L3 12 EXH port Station

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Nil N F Rc NPT G Lead wire (Refer to page 35.)

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Holding Force Holding force (N) 25 32 40 50 63 363 588 922 1471 2256 Bore size (mm) 861 A Sine Rodless Cylinder 12-REA Dimensions 12-REA25/32/40 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

•

25 NPN output NPN opal coledot' 30V. SImA, rma l vollaQl9"IV ()( less ZSE4B-~: -26 Vacuum Analog output 1-5V( S%F S.I. load lq>edaoc:e: IkO ZSE4B -~: -65 P NP output PNP open co~ eclor MmA ISE4LB~i -25 Posilive pressure NPN output NPN0)J (l OJi eclGf 30V. 8rhA, resma l vol tage'!

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

2/3 Port Valve for Various

33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

Steam Valve

U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43

ZQ

above dimensions are for ZQ11U-J2 L-F.

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

5 Port Solenoid Valve Series SQ1000/2000

(0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

CL

300 20Double acting Single rod Both directions 9-2-17 Data Series CLG1 20 25 to 200 25 32 40 Double acting Single rod Both directions 25 to 300 9-2-27 Lock-up cylinder Series CL1 25 to 500 40 25 to 600 50, 63 Double acting Single rod One direction 9-3-1 25 to 700 80, 100 Up to 1600 125, 140 160 9-2-3 Fine Lock Cylinders/Lock-up Cylinder Precautions The precautions on these pages are for the